数値制御EEM (Elastic Emission Machining) 加工システムの開発

Yamauchi, Kazuto; Mimura, Hidekazu; Mori, Yuzo

表面科学, 2001, 22(3), 152-159

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Identifier to cite or link to this item: https://hdl.handle.net/11094/85461

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Title
数値制御EEM (Elastic Emission Machining) 加工システムの開発
Development of Numerically Controlled EEM (Elastic Emission Machining) System
Creator
NRID
1000010174575 1000010174575
researchmap permalink
yamauchikazuto yamauchikazuto
Scopus Author ID
7801509680 7801509680
CreatorName
Yamauchi, Kazuto
NRID
1000030362651 1000030362651
CreatorName
Mimura, Hidekazu
NRID
1000000029125 1000000029125
CreatorName
Mori, Yuzo
Description
山内 和人, 三村 秀和, 森 勇藏, 数値制御EEM (Elastic Emission Machining) 加工システムの開発, 表面科学, 2001, 22巻, 3号, p. 152-159, https://doi.org/10.1380/jsssj.22.152.
Abstract
Ultraprecise figuring systems are needed in many scientific fields. For example the mirrors for synchrotron-radiation X-ray facilities and extreme ultraviolet lithography systems should have atomically smoothed surfaces and extremely high figure accuracy of the order of nanometer range. Furthermore, next-generation semiconductor surfaces should be atomically flat as the substrates for nanometer devices. The EEM (Elastic Emission Machining) system developed by the authors can provide the atomically smoothed surfaces free from any crystallographic damage. A basic research has been performed to evaluate the use of a numerically controlled EEM system for ultraprecise figure corrections. We have constructed an EEM figuring system for ultraprecise scientific components. Testing showed that its performances are sufficient for figuring with nanometer accuracy.
Publisher
日本表面科学会
The Surface Science Society of Japan
Source Title
表面科学
Volume (Issue)
22(3)
Page
152-159
Date of Issued
2001-03
Language
Japanese
Handle URL
https://hdl.handle.net/11094/85461
PISSN
03885321
eISSN
18814743
NCID
AN00334149
Relation.isIdenticalTo
DOI (Publisher Version)
https://doi.org/10.1380/jsssj.22.152
Access Rights
open access
CopyRight
This article is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License.
oaire:version
Version of Record
Category
学術雑誌論文 Journal Article