Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining

Yamauchi, Kazuto; Mimura, Hidekazu; Inagaki, Kouji et al.

Review of Scientific Instruments, 2002, 73(11), 4028-4033

Number of Access:550（2025-08-15 21:11 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/85463

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Title
Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining
Creator
NRID
1000010174575 1000010174575
researchmap permalink
yamauchikazuto yamauchikazuto
Scopus Author ID
7801509680 7801509680
CreatorName
Yamauchi, Kazuto
NRID
1000030362651 1000030362651
CreatorName
Mimura, Hidekazu
NRID
1000050273579 1000050273579
researchmap permalink
read0185268 read0185268
Scopus Author ID
35513238700 35513238700
CreatorName
Inagaki, Kouji
NRID
1000000029125 1000000029125
CreatorName
Mori, Yuzo
Description
Kazuto Yamauchi, Hidekazu Mimura, Kouji Inagaki, and Yuzo Mori, "Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining", Review of Scientific Instruments 73, 4028-4033 (2002) https://doi.org/10.1063/1.1510573.
Abstract
A numerically controlled elastic emission machining (EEM) system has been developed to fabricate ultraprecise optical components, particularly in x-ray optics. Nozzle-type EEM heads, by which a high shear-rate flow of ultrapure water can be generated on the work surface, have been newly proposed to transport the fine powder particles to the processing surface. Using this type of EEM head, the obtainable spatial resolution in figure correction can be changed by selecting the suitable aperture size of the nozzle according to the required spatial frequency. As a result of test figuring, 1 nm level peak-to-valley (p–v) accuracy is achieved throughout the entire spatial wavelength range longer than 0.3 mm. In addition, the microroughness of the processed surface is certified to also be approximately 1 nm (p–v).
Publisher
AIP Publishing
Source Title
Review of Scientific Instruments
Volume (Issue)
73(11)
Page
4028-4033
Date of Issued
2002-11
Language
English
Handle URL
https://hdl.handle.net/11094/85463
PISSN
00346748
NCID
AA00817730
Relation.isIdenticalTo
DOI (Publisher Version)
https://doi.org/10.1063/1.1510573
Access Rights
open access
CopyRight
This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments and may be found at https://doi.org/10.1063/1.1510573.
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Category
学術雑誌論文 Journal Article