Microstitching interferometry for x-ray reflective optics

Yamauchi, Kazuto; Yamamura, Kazuya; Mimura, Hidekazu; Sano, Yasuhisa; Saito, Akira; Ueno, Kazumasa; Endo, Katsuyoshi; Souvorov, Alexei; Yabashi, Makina; Tamasaku, Kenji; Ishikawa, Tetsuya; Mori, Yuzo

doi:https://doi.org/10.1063/1.1569405

Microstitching interferometry for x-ray reflective optics

Yamauchi, Kazuto; Yamamura, Kazuya; Mimura, Hidekazu et al.

Review of Scientific Instruments, 2003, 74(5), 2894-2898

Number of Access:995（2025-10-08 11:29 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/85465

Link to primary information

File	Format	Terms of use	Size	Views	Date.Available	Description	information
153221_1	pdf	None	596 KB	300	2021.12.28

Item Information

Output File Export EndNote Basic Export Mendeley

Title	Microstitching interferometry for x-ray reflective optics
Creator	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, Kazuto
	NRID 1000060240074 1000060240074 researchmap permalink read0014013 read0014013 Scopus Author ID 7201754767 7201754767 CreatorName Yamamura, Kazuya
	NRID 1000030362651 1000030362651 CreatorName Mimura, Hidekazu
	NRID 1000040252598 1000040252598 ORCID 0000-0002-1767-922X 0000-0002-1767-922X researchmap permalink read0042804 read0042804 Scopus Author ID 7402344818 7402344818 CreatorName Sano, Yasuhisa
	NRID 1000090294024 1000090294024 ORCID 0000-0003-3859-5575 0000-0003-3859-5575 researchmap permalink nyudo nyudo Scopus Author ID 55725475700 55725475700 CreatorName Saito, Akira
	CreatorName Ueno, Kazumasa
	NRID 1000090152008 1000090152008 researchmap permalink endo5352 endo5352 Scopus Author ID 7402712908 7402712908 CreatorName Endo, Katsuyoshi
	CreatorName Souvorov, Alexei
	NRID 1000000372144 1000000372144 CreatorName Yabashi, Makina
	NRID 1000030300883 1000030300883 CreatorName Tamasaku, Kenji
	NRID 1000080159699 1000080159699 CreatorName Ishikawa, Tetsuya
	NRID 1000000029125 1000000029125 CreatorName Mori, Yuzo
Description	Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Kazumasa Ueno, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa and Yuzo Mori, "Microstitching interferometry for x-ray reflective optics", Review of Scientific Instruments 74, 2894-2898 (2003) https://doi.org/10.1063/1.1569405.
Abstract	A new stitching interferometry based on a microscopic interferometer having peak-to-valley height accuracy of subnanometer order and lateral resolution higher than 20 μm was developed to measure surface figures of large-size x-ray mirror optics. Cumulative errors of the stitching angle in a long spatial wavelength range were effectively reduced to be 1×10−7 rad levels using another interferometer having a large cross section in the optical cavity. Some optical performances of ultraprecise x-ray mirrors, such as submicrofocused beam profile, were wave optically calculated from the measured surface figure profiles and observed at the 1 km long beamline (BL29XUL) of SPring-8. Observed and wave optically calculated results were in good agreement with a high degree of accuracy.
Publisher	AIP Publishing
Source Title	Review of Scientific Instruments
Volume (Issue)	74(5)
Page	2894-2898
Date of Issued	2003-05
Language	English
Handle URL	https://hdl.handle.net/11094/85465
PISSN	00346748
NCID	AA00817730
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1063/1.1569405
Access Rights	open access
CopyRight	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments and may be found at https://doi.org/10.1063/1.1569405.
oaire:version	Version of Record
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Review of Scientific Instruments. 2003, 74(5), p. 2894-2898
DC.title	Microstitching interferometry for x-ray reflective optics
DC.creator	Yamauchi, Kazuto
	Yamamura, Kazuya
	Mimura, Hidekazu
	Sano, Yasuhisa
	Saito, Akira
	Ueno, Kazumasa
	Endo, Katsuyoshi
	Souvorov, Alexei
	Yabashi, Makina
	Tamasaku, Kenji
	Ishikawa, Tetsuya
	Mori, Yuzo
DC.publisher	AIP Publishing
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2003-05
DC.identifier	https://doi.org/10.1063/1.1569405
DC.description	Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Kazumasa Ueno, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa and Yuzo Mori, "Microstitching interferometry for x-ray reflective optics", Review of Scientific Instruments 74, 2894-2898 (2003) https://doi.org/10.1063/1.1569405.
DCTERMS.abstract	A new stitching interferometry based on a microscopic interferometer having peak-to-valley height accuracy of subnanometer order and lateral resolution higher than 20 μm was developed to measure surface figures of large-size x-ray mirror optics. Cumulative errors of the stitching angle in a long spatial wavelength range were effectively reduced to be 1×10−7 rad levels using another interferometer having a large cross section in the optical cavity. Some optical performances of ultraprecise x-ray mirrors, such as submicrofocused beam profile, were wave optically calculated from the measured surface figure profiles and observed at the 1 km long beamline (BL29XUL) of SPring-8. Observed and wave optically calculated results were in good agreement with a high degree of accuracy.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments and may be found at https://doi.org/10.1063/1.1569405.
DC.format	85465
citation_title	Microstitching interferometry for x-ray reflective optics
citation_author	Yamauchi, Kazuto
	Yamamura, Kazuya
	Mimura, Hidekazu
	Sano, Yasuhisa
	Saito, Akira
	Ueno, Kazumasa
	Endo, Katsuyoshi
	Souvorov, Alexei
	Yabashi, Makina
	Tamasaku, Kenji
	Ishikawa, Tetsuya
	Mori, Yuzo
citation_publisher	AIP Publishing
citation_language	English
citation_date	2003-05
citation_journal_title	Review of Scientific Instruments
citation_volume	74
citation_issue	5
citation_firstpage	2894
citation_lastpage	2898
citation_doi	https://doi.org/10.1063/1.1569405
citation_public_url	https://hdl.handle.net/11094/85465

Microstitching interferometry for x-ray reflective optics

Link to primary information

Item Information

Show details