At-wavelength figure metrology of total reflection mirrors in hard x-ray region

Yumoto, Hirokatsu; Mimura, Hidekazu; Matsuyama, Satoshi; Handa, Soichiro; Shibatani, Akihiko; Katagishi, Keiko; Sano, Yasuhisa; Yabashi, Makina; Nishino, Yoshinori; Tamasaku, Kenji; Ishikawa, Tetsuya; Yamauchi, Kazuto

doi:https://doi.org/10.1117/12.681587

At-wavelength figure metrology of total reflection mirrors in hard x-ray region

Yumoto, Hirokatsu; Mimura, Hidekazu; Matsuyama, Satoshi et al.

Proceedings of SPIE - The International Society for Optical Engineering, 2006, 6317, 631709

Number of Access:761（2025-08-15 06:46 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86926

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Title	At-wavelength figure metrology of total reflection mirrors in hard x-ray region
Creator	NRID 1000020423197 1000020423197 CreatorName Yumoto, Hirokatsu
	NRID 1000030362651 1000030362651 CreatorName Mimura, Hidekazu
	NRID 1000010423196 1000010423196 CreatorName Matsuyama, Satoshi
	CreatorName Handa, Soichiro
	CreatorName Shibatani, Akihiko
	CreatorName Katagishi, Keiko
	NRID 1000040252598 1000040252598 ORCID 0000-0002-1767-922X 0000-0002-1767-922X researchmap permalink read0042804 read0042804 Scopus Author ID 7402344818 7402344818 CreatorName Sano, Yasuhisa
	NRID 1000000372144 1000000372144 CreatorName Yabashi, Makina
	NRID 1000040392063 1000040392063 CreatorName Nishino, Yoshinori
	NRID 1000030300883 1000030300883 CreatorName Tamasaku, Kenji
	NRID 1000080159699 1000080159699 CreatorName Ishikawa, Tetsuya
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, Kazuto
Subject	hard X-ray mirror
	X-ray nanofocusing
	at-wavelength wave-front metrology
	surface figure metrology
	fabrication technique
Description	Hirokatsu Yumoto, Hidekazu Mimura, Satoshi Matsuyama, Soichiro Handa, Akihiko Shibatani, Keiko Katagishi, Yasuhisa Sano, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, and Kazuto Yamauchi "At-wavelength figure metrology of total reflection mirrors in hard x-ray region", Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631709 (29 August 2006); https://doi.org/10.1117/12.681587.
Publisher	The International Society for Optical Engineering
Source Title	Proceedings of SPIE - The International Society for Optical Engineering
Volume (Issue)	6317
Page	631709
Date of Issued	2006-08-29
Language	English
Handle URL	https://hdl.handle.net/11094/86926
PISSN	0277786X
eISSN	1996756X
NCID	AA10619755
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1117/12.681587
Access Rights	open access
CopyRight	Copyright 2006 SPIE. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, or modification of the contents of the publication are prohibited.
oaire:version	Version of Record
Category	会議発表論文 Conference Paper

Resource Type	conference paper
Local Type	Conference Paper
DCMI Type	Text
DCTERMS.bibliographicCitation	Proceedings of SPIE - The International Society for Optical Engineering. 2006, 6317, p. 631709
DC.title	At-wavelength figure metrology of total reflection mirrors in hard x-ray region
DC.creator	Yumoto, Hirokatsu
	Mimura, Hidekazu
	Matsuyama, Satoshi
	Handa, Soichiro
	Shibatani, Akihiko
	Katagishi, Keiko
	Sano, Yasuhisa
	Yabashi, Makina
	Nishino, Yoshinori
	Tamasaku, Kenji
	Ishikawa, Tetsuya
	Yamauchi, Kazuto
DC.publisher	The International Society for Optical Engineering
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2006-08-29
DC.identifier	https://doi.org/10.1117/12.681587
DC.subject	hard X-ray mirror
	X-ray nanofocusing
	at-wavelength wave-front metrology
	surface figure metrology
	fabrication technique
DC.description	Hirokatsu Yumoto, Hidekazu Mimura, Satoshi Matsuyama, Soichiro Handa, Akihiko Shibatani, Keiko Katagishi, Yasuhisa Sano, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, and Kazuto Yamauchi "At-wavelength figure metrology of total reflection mirrors in hard x-ray region", Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631709 (29 August 2006); https://doi.org/10.1117/12.681587.
DC.rights	Copyright 2006 SPIE. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, or modification of the contents of the publication are prohibited.
DC.format	86926
citation_title	At-wavelength figure metrology of total reflection mirrors in hard x-ray region
citation_author	Yumoto, Hirokatsu
	Mimura, Hidekazu
	Matsuyama, Satoshi
	Handa, Soichiro
	Shibatani, Akihiko
	Katagishi, Keiko
	Sano, Yasuhisa
	Yabashi, Makina
	Nishino, Yoshinori
	Tamasaku, Kenji
	Ishikawa, Tetsuya
	Yamauchi, Kazuto
citation_publisher	The International Society for Optical Engineering
citation_language	English
citation_date	2006-08-29
citation_journal_title	Proceedings of SPIE - The International Society for Optical Engineering
citation_volume	6317
citation_firstpage	631709
citation_doi	https://doi.org/10.1117/12.681587
citation_public_url	https://hdl.handle.net/11094/86926

At-wavelength figure metrology of total reflection mirrors in hard x-ray region

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