Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors

Goto, Takumi; Nakamori, Hiroki; Kimura, Takashi; Sano, Yasuhisa; Kohmura, Yoshiki; Tamasaku, Kenji; Yabashi, Makina; Ishikawa, Tetsuya; Yamauchi, Kazuto; Matsuyama, Satoshi

doi:https://doi.org/10.1063/1.4916617

Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors

Goto, Takumi; Nakamori, Hiroki; Kimura, Takashi et al.

Review of Scientific Instruments, 2015, 86(4), 043102

Number of Access:1,042（2025-10-08 09:42 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86948

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Title	Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors
Creator	CreatorName Goto, Takumi
	CreatorName Nakamori, Hiroki
	NRID 1000050531472 1000050531472 CreatorName Kimura, Takashi
	NRID 1000040252598 1000040252598 ORCID 0000-0002-1767-922X 0000-0002-1767-922X researchmap permalink read0042804 read0042804 Scopus Author ID 7402344818 7402344818 CreatorName Sano, Yasuhisa
	NRID 1000030270599 1000030270599 CreatorName Kohmura, Yoshiki
	NRID 1000030300883 1000030300883 CreatorName Tamasaku, Kenji
	NRID 1000000372144 1000000372144 CreatorName Yabashi, Makina
	NRID 1000080159699 1000080159699 CreatorName Ishikawa, Tetsuya
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, Kazuto
	NRID 1000010423196 1000010423196 CreatorName Matsuyama, Satoshi
Description	Takumi Goto, Hiroki Nakamori, Takashi Kimura, Yasuhisa Sano, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi, and Satoshi Matsuyama, "Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors", Review of Scientific Instruments 86, 043102 (2015) https://doi.org/10.1063/1.4916617.
Abstract	An adaptive Kirkpatrick-Baez mirror focusing optics based on piezoelectric deformable mirrors was constructed at SPring-8 and its focusing performance characteristics were demonstrated. By adjusting the voltages applied to the deformable mirrors, the shape errors (compared to a target elliptical shape) were finely corrected on the basis of the mirror shape determined using the pencil-beam method, which is a type of at-wavelength figure metrology in the X-ray region. The mirror shapes were controlled with a peak-to-valley height accuracy of 2.5 nm. A focused beam with an intensity profile having a full width at half maximum of 110 × 65 nm (V × H) was achieved at an X-ray energy of 10 keV.
Publisher	American Institute of Physics
Source Title	Review of Scientific Instruments
Volume (Issue)	86(4)
Page	043102
Date of Issued	2015-04
Language	English
Handle URL	https://hdl.handle.net/11094/86948
PISSN	00346748
eISSN	10897623
NCID	AA00693547
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1063/1.4916617
Access Rights	open access
CopyRight	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in (citation of published article) and may be found at https://doi.org/10.1063/1.4916617.
oaire:version	Version of Record
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Review of Scientific Instruments. 2015, 86(4), p. 043102
DC.title	Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors
DC.creator	Goto, Takumi
	Nakamori, Hiroki
	Kimura, Takashi
	Sano, Yasuhisa
	Kohmura, Yoshiki
	Tamasaku, Kenji
	Yabashi, Makina
	Ishikawa, Tetsuya
	Yamauchi, Kazuto
	Matsuyama, Satoshi
DC.publisher	American Institute of Physics
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2015-04
DC.identifier	https://doi.org/10.1063/1.4916617
DC.description	Takumi Goto, Hiroki Nakamori, Takashi Kimura, Yasuhisa Sano, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi, and Satoshi Matsuyama, "Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors", Review of Scientific Instruments 86, 043102 (2015) https://doi.org/10.1063/1.4916617.
DCTERMS.abstract	An adaptive Kirkpatrick-Baez mirror focusing optics based on piezoelectric deformable mirrors was constructed at SPring-8 and its focusing performance characteristics were demonstrated. By adjusting the voltages applied to the deformable mirrors, the shape errors (compared to a target elliptical shape) were finely corrected on the basis of the mirror shape determined using the pencil-beam method, which is a type of at-wavelength figure metrology in the X-ray region. The mirror shapes were controlled with a peak-to-valley height accuracy of 2.5 nm. A focused beam with an intensity profile having a full width at half maximum of 110 × 65 nm (V × H) was achieved at an X-ray energy of 10 keV.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in (citation of published article) and may be found at https://doi.org/10.1063/1.4916617.
DC.format	86948
citation_title	Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors
citation_author	Goto, Takumi
	Nakamori, Hiroki
	Kimura, Takashi
	Sano, Yasuhisa
	Kohmura, Yoshiki
	Tamasaku, Kenji
	Yabashi, Makina
	Ishikawa, Tetsuya
	Yamauchi, Kazuto
	Matsuyama, Satoshi
citation_publisher	American Institute of Physics
citation_language	English
citation_date	2015-04
citation_journal_title	Review of Scientific Instruments
citation_volume	86
citation_issue	4
citation_firstpage	043102
citation_doi	https://doi.org/10.1063/1.4916617
citation_public_url	https://hdl.handle.net/11094/86948

Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors

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