Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system

Inoue, Takato; Nishioka, Yuka; Matsuyama, Satoshi; Sonoyama, Junki; Akiyama, Kazuteru; Nakamori, Hiroki; Ichii, Yoshio; Sano, Yasuhisa; Shi, Xianbo; Shu, Deming; Wyman, Max D.; Harder, Ross; Kohmura, Yoshiki; Yabashi, Makina; Assoufid, Lahsen; Ishikawa, Tetsuya; Yamauchi, Kazuto

doi:https://doi.org/10.1063/5.0070465

Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system

Inoue, Takato; Nishioka, Yuka; Matsuyama, Satoshi et al.

Review of Scientific Instruments, 2021, 92(12), 123706

Number of Access:1,237（2025-08-15 06:46 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86960

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Title	Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system
Creator	CreatorName Inoue, Takato
	CreatorName Nishioka, Yuka
	NRID 1000010423196 1000010423196 CreatorName Matsuyama, Satoshi
	CreatorName Sonoyama, Junki
	CreatorName Akiyama, Kazuteru
	CreatorName Nakamori, Hiroki
	CreatorName Ichii, Yoshio
	NRID 1000040252598 1000040252598 ORCID 0000-0002-1767-922X 0000-0002-1767-922X researchmap permalink read0042804 read0042804 Scopus Author ID 7402344818 7402344818 CreatorName Sano, Yasuhisa
	CreatorName Shi, Xianbo
	CreatorName Shu, Deming
	CreatorName Wyman, Max D.
	CreatorName Harder, Ross
	NRID 1000030270599 1000030270599 CreatorName Kohmura, Yoshiki
	NRID 1000000372144 1000000372144 CreatorName Yabashi, Makina
	CreatorName Assoufid, Lahsen
	NRID 1000080159699 1000080159699 CreatorName Ishikawa, Tetsuya
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, Kazuto
Description	Takato Inoue, Yuka Nishioka, Satoshi Matsuyama, Junki Sonoyama, Kazuteru Akiyama, Hiroki Nakamori, Yoshio Ichii, Yasuhisa Sano, Xianbo Shi, Deming Shu, Max D. Wyman, Ross Harder, Yoshiki Kohmura, Makina Yabashi, Lahsen Assoufid, Tetsuya Ishikawa, and Kazuto Yamauchi, "Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system", Review of Scientific Instruments 92, 123706 (2021), https://doi.org/10.1063/5.0070465.
Abstract	A hybrid deformable x-ray mirror consisting of a mechanical bender and a bimorph deformable mirror has been developed to realize adaptive optical systems, such as zoom condenser optics, for synchrotron-radiation-based x-ray microscopy. In the developed system, both bending mechanisms comprehensively contribute to the formation of the target mirror shape and can narrow the role of piezoelectric actuators, thereby enabling a more stable operation. In this study, the behavior of the bimorph mirror under the clamped condition was investigated, and the sharing of the deformation amount for each bending mechanism was optimized to minimize the amplitude of the voltage distribution of the bimorph mirror.
Publisher	American Institute of Physics
Source Title	Review of Scientific Instruments
Volume (Issue)	92(12)
Page	123706
Date of Issued	2021-12-28
Language	English
Handle URL	https://hdl.handle.net/11094/86960
PISSN	00346748
eISSN	10897623
NCID	AA00817730
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1063/5.0070465
Relation.isIdenticalTo	PMID 34972426
Access Rights	open access
CopyRight	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in (citation of published article) and may be found at https://doi.org/10.1063/5.0070465.
oaire:version	Version of Record
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Review of Scientific Instruments. 2021, 92(12), p. 123706
DC.title	Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system
DC.creator	Inoue, Takato
	Nishioka, Yuka
	Matsuyama, Satoshi
	Sonoyama, Junki
	Akiyama, Kazuteru
	Nakamori, Hiroki
	Ichii, Yoshio
	Sano, Yasuhisa
	Shi, Xianbo
	Shu, Deming
	Wyman, Max D.
	Harder, Ross
	Kohmura, Yoshiki
	Yabashi, Makina
	Assoufid, Lahsen
	Ishikawa, Tetsuya
	Yamauchi, Kazuto
DC.publisher	American Institute of Physics
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2021-12-28
DC.identifier	https://doi.org/10.1063/5.0070465
DC.description	Takato Inoue, Yuka Nishioka, Satoshi Matsuyama, Junki Sonoyama, Kazuteru Akiyama, Hiroki Nakamori, Yoshio Ichii, Yasuhisa Sano, Xianbo Shi, Deming Shu, Max D. Wyman, Ross Harder, Yoshiki Kohmura, Makina Yabashi, Lahsen Assoufid, Tetsuya Ishikawa, and Kazuto Yamauchi, "Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system", Review of Scientific Instruments 92, 123706 (2021), https://doi.org/10.1063/5.0070465.
DCTERMS.abstract	A hybrid deformable x-ray mirror consisting of a mechanical bender and a bimorph deformable mirror has been developed to realize adaptive optical systems, such as zoom condenser optics, for synchrotron-radiation-based x-ray microscopy. In the developed system, both bending mechanisms comprehensively contribute to the formation of the target mirror shape and can narrow the role of piezoelectric actuators, thereby enabling a more stable operation. In this study, the behavior of the bimorph mirror under the clamped condition was investigated, and the sharing of the deformation amount for each bending mechanism was optimized to minimize the amplitude of the voltage distribution of the bimorph mirror.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in (citation of published article) and may be found at https://doi.org/10.1063/5.0070465.
DC.format	86960
citation_title	Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system
citation_author	Inoue, Takato
	Nishioka, Yuka
	Matsuyama, Satoshi
	Sonoyama, Junki
	Akiyama, Kazuteru
	Nakamori, Hiroki
	Ichii, Yoshio
	Sano, Yasuhisa
	Shi, Xianbo
	Shu, Deming
	Wyman, Max D.
	Harder, Ross
	Kohmura, Yoshiki
	Yabashi, Makina
	Assoufid, Lahsen
	Ishikawa, Tetsuya
	Yamauchi, Kazuto
citation_publisher	American Institute of Physics
citation_language	English
citation_date	2021-12-28
citation_journal_title	Review of Scientific Instruments
citation_volume	92
citation_issue	12
citation_firstpage	123706
citation_doi	https://doi.org/10.1063/5.0070465
citation_pmid	34972426
citation_public_url	https://hdl.handle.net/11094/86960

Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system

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