Development of a glue-free bimorph mirror for use in vacuum chambers

Ichii, Yoshio; Okada, Hiromi; Nakamori, Hiroki; Ueda, Akihiko; Yamaguchi, Hiroyuki; Matsuyama, Satoshi; Yamauchi, Kazuto

doi:https://doi.org/10.1063/1.5066105

Development of a glue-free bimorph mirror for use in vacuum chambers

Ichii, Yoshio; Okada, Hiromi; Nakamori, Hiroki et al.

Review of Scientific Instruments, 2019, 90(2), 021702

Number of Access:895（2025-08-16 04:13 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86962

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Title	Development of a glue-free bimorph mirror for use in vacuum chambers
Creator	CreatorName Ichii, Yoshio
	CreatorName Okada, Hiromi
	CreatorName Nakamori, Hiroki
	CreatorName Ueda, Akihiko
	CreatorName Yamaguchi, Hiroyuki
	NRID 1000010423196 1000010423196 CreatorName Matsuyama, Satoshi
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, Kazuto
Description	Yoshio Ichii, Hiromi Okada, Hiroki Nakamori, Akihiko Ueda, Hiroyuki Yamaguchi, Satoshi Matsuyama, and Kazuto Yamauchi, "Development of a glue-free bimorph mirror for use in vacuum chambers", Review of Scientific Instruments 90, 021702 (2019), https://doi.org/10.1063/1.5066105.
Abstract	PZT (lead zirconate titanate)-glued bimorph deformable mirrors are widely used in hard X-ray regimes; however, they have not yet been used in soft X-ray regimes because they are less compatible for usage under high vacuum. In this study, we developed a glue-free bimorph deformable mirror, in which silver nano-particles were employed to bond PZT actuators to mirror substrates. Under an appropriate bonding condition, the bonding layer was confirmed to be uniform and the mirror's bending characteristics were demonstrated to be sufficiently stable; its gas emission rate was also shown to be acceptable. Piezo responses before and after additional heating at 200 °C showed the thermal stability of its bonding and bending properties.
Publisher	American Institute of Physics
Source Title	Review of Scientific Instruments
Volume (Issue)	90(2)
Page	021702
Date of Issued	2019-02-11
Language	English
Handle URL	https://hdl.handle.net/11094/86962
PISSN	00346748
eISSN	10897623
NCID	AA00817730
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1063/1.5066105
Relation.isIdenticalTo	PMID 30831767
Access Rights	open access
CopyRight	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in (citation of published article) and may be found at https://doi.org/10.1063/1.5066105.
oaire:version	Version of Record
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Review of Scientific Instruments. 2019, 90(2), p. 021702
DC.title	Development of a glue-free bimorph mirror for use in vacuum chambers
DC.creator	Ichii, Yoshio
	Okada, Hiromi
	Nakamori, Hiroki
	Ueda, Akihiko
	Yamaguchi, Hiroyuki
	Matsuyama, Satoshi
	Yamauchi, Kazuto
DC.publisher	American Institute of Physics
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2019-02-11
DC.identifier	https://doi.org/10.1063/1.5066105
DC.description	Yoshio Ichii, Hiromi Okada, Hiroki Nakamori, Akihiko Ueda, Hiroyuki Yamaguchi, Satoshi Matsuyama, and Kazuto Yamauchi, "Development of a glue-free bimorph mirror for use in vacuum chambers", Review of Scientific Instruments 90, 021702 (2019), https://doi.org/10.1063/1.5066105.
DCTERMS.abstract	PZT (lead zirconate titanate)-glued bimorph deformable mirrors are widely used in hard X-ray regimes; however, they have not yet been used in soft X-ray regimes because they are less compatible for usage under high vacuum. In this study, we developed a glue-free bimorph deformable mirror, in which silver nano-particles were employed to bond PZT actuators to mirror substrates. Under an appropriate bonding condition, the bonding layer was confirmed to be uniform and the mirror's bending characteristics were demonstrated to be sufficiently stable; its gas emission rate was also shown to be acceptable. Piezo responses before and after additional heating at 200 °C showed the thermal stability of its bonding and bending properties.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in (citation of published article) and may be found at https://doi.org/10.1063/1.5066105.
DC.format	86962
citation_title	Development of a glue-free bimorph mirror for use in vacuum chambers
citation_author	Ichii, Yoshio
	Okada, Hiromi
	Nakamori, Hiroki
	Ueda, Akihiko
	Yamaguchi, Hiroyuki
	Matsuyama, Satoshi
	Yamauchi, Kazuto
citation_publisher	American Institute of Physics
citation_language	English
citation_date	2019-02-11
citation_journal_title	Review of Scientific Instruments
citation_volume	90
citation_issue	2
citation_firstpage	021702
citation_doi	https://doi.org/10.1063/1.5066105
citation_pmid	30831767
citation_public_url	https://hdl.handle.net/11094/86962

Development of a glue-free bimorph mirror for use in vacuum chambers

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