X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors

Yamada, Jumpei; Inoue, Takato; Nakamura, Nami; Kameshima, Takashi; Yamauchi, Kazuto; Matsuyama, Satoshi; Yabashi, Makina

doi:https://doi.org/10.3390/s20247356

X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors

Yamada, Jumpei; Inoue, Takato; Nakamura, Nami et al.

Sensors, 2020, 20(24), 7356

Number of Access:994（2025-08-14 02:42 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86966

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Title	X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors
Creator	NRID 1000010845027 1000010845027 researchmap permalink J_Y190325 J_Y190325 CreatorName Yamada, Jumpei
	CreatorName Inoue, Takato
	CreatorName Nakamura, Nami
	NRID 1000050558046 1000050558046 CreatorName Kameshima, Takashi
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, Kazuto
	NRID 1000010423196 1000010423196 CreatorName Matsuyama, Satoshi
	NRID 1000000372144 1000000372144 CreatorName Yabashi, Makina
Subject	X-ray mirror
	X-ray nanofocusing
	wavefront correction
	grating interferometer
Description	Yamada, J.; Inoue, T.; Nakamura, N.; Kameshima, T.; Yamauchi, K.; Matsuyama, S.; Yabashi, M. X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors. Sensors 2020, 20, 7356. https://doi.org/10.3390/s20247356.
Abstract	X-ray single-grating interferometry was applied to conduct accurate wavefront corrections for hard X-ray nanofocusing mirrors. Systematic errors in the interferometer, originating from a grating, a detector, and alignment errors of the components, were carefully examined. Based on the measured wavefront errors, the mirror shapes were directly corrected using a differential deposition technique. The corrected X-ray focusing mirrors with a numerical aperture of 0.01 attained two-dimensionally diffraction-limited performance. The results of the correction indicate that the uncertainty of the wavefront measurement was less than λ/72 in root-mean-square value.
Publisher	MDPI
Source Title	Sensors
Volume (Issue)	20(24)
Page	7356
Date of Issued	2020-12-02
Language	English
Handle URL	https://hdl.handle.net/11094/86966
eISSN	14248220
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.3390/s20247356
Relation.isIdenticalTo	PMID 33371522
Access Rights	open access
CopyRight	This article is licensed under a Creative Commons Attribution 4.0 International License.
oaire:version	Version of Record
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Sensors. 2020, 20(24), p. 7356
DC.title	X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors
DC.creator	Yamada, Jumpei
	Inoue, Takato
	Nakamura, Nami
	Kameshima, Takashi
	Yamauchi, Kazuto
	Matsuyama, Satoshi
	Yabashi, Makina
DC.publisher	MDPI
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2020-12-02
DC.identifier	https://doi.org/10.3390/s20247356
DC.subject	X-ray mirror
	X-ray nanofocusing
	wavefront correction
	grating interferometer
DC.description	Yamada, J.; Inoue, T.; Nakamura, N.; Kameshima, T.; Yamauchi, K.; Matsuyama, S.; Yabashi, M. X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors. Sensors 2020, 20, 7356. https://doi.org/10.3390/s20247356.
DCTERMS.abstract	X-ray single-grating interferometry was applied to conduct accurate wavefront corrections for hard X-ray nanofocusing mirrors. Systematic errors in the interferometer, originating from a grating, a detector, and alignment errors of the components, were carefully examined. Based on the measured wavefront errors, the mirror shapes were directly corrected using a differential deposition technique. The corrected X-ray focusing mirrors with a numerical aperture of 0.01 attained two-dimensionally diffraction-limited performance. The results of the correction indicate that the uncertainty of the wavefront measurement was less than λ/72 in root-mean-square value.
DC.rights	This article is licensed under a Creative Commons Attribution 4.0 International License.
DC.format	86966
citation_title	X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors
citation_author	Yamada, Jumpei
	Inoue, Takato
	Nakamura, Nami
	Kameshima, Takashi
	Yamauchi, Kazuto
	Matsuyama, Satoshi
	Yabashi, Makina
citation_publisher	MDPI
citation_language	English
citation_date	2020-12-02
citation_journal_title	Sensors
citation_volume	20
citation_issue	24
citation_firstpage	7356
citation_doi	https://doi.org/10.3390/s20247356
citation_pmid	33371522
citation_public_url	https://hdl.handle.net/11094/86966

X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors

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