Relative angle determinable stitching interferometry for hard x-ray reflective optics

Mimura, Hidekazu; Yumoto, Hirokatsu; Matsuyama, Satoshi; Yamamura, Kazuya; Sano, Yasuhisa; Ueno, Kazumasa; Endo, Katsuyoshi; Mori, Yuzo; Yabashi, Makina; Tamasaku, Kenji; Nishino, Yoshinori; Ishikawa, Tetsuya; Yamauchi, Kazuto

doi:https://doi.org/10.1063/1.1868472

Relative angle determinable stitching interferometry for hard x-ray reflective optics

Mimura, Hidekazu; Yumoto, Hirokatsu; Matsuyama, Satoshi et al.

Review of Scientific Instruments, 2005, 76(4), 045102

Number of Access:976（2025-08-14 23:20 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86967

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Title	Relative angle determinable stitching interferometry for hard x-ray reflective optics
Creator	NRID 1000030362651 1000030362651 CreatorName Mimura, Hidekazu
	NRID 1000020423197 1000020423197 CreatorName Yumoto, Hirokatsu
	NRID 1000010423196 1000010423196 CreatorName Matsuyama, Satoshi
	NRID 1000060240074 1000060240074 researchmap permalink read0014013 read0014013 Scopus Author ID 7201754767 7201754767 CreatorName Yamamura, Kazuya
	NRID 1000040252598 1000040252598 ORCID 0000-0002-1767-922X 0000-0002-1767-922X researchmap permalink read0042804 read0042804 Scopus Author ID 7402344818 7402344818 CreatorName Sano, Yasuhisa
	CreatorName Ueno, Kazumasa
	NRID 1000090152008 1000090152008 researchmap permalink endo5352 endo5352 Scopus Author ID 7402712908 7402712908 CreatorName Endo, Katsuyoshi
	NRID 1000000029125 1000000029125 CreatorName Mori, Yuzo
	NRID 1000000372144 1000000372144 CreatorName Yabashi, Makina
	NRID 1000030300883 1000030300883 CreatorName Tamasaku, Kenji
	NRID 1000040392063 1000040392063 CreatorName Nishino, Yoshinori
	NRID 1000080159699 1000080159699 CreatorName Ishikawa, Tetsuya
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, Kazuto
Description	Hidekazu Mimura, Hirokatsu Yumoto, Satoshi Matsuyama, Kazuya Yamamura, Yasuhisa Sano, Kazumasa Ueno, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa and Kazuto Yamauchi, "Relative angle determinable stitching interferometry for hard x-ray reflective optics", Review of Scientific Instruments 76(4), 045102 (2005) https://doi.org/10.1063/1.1868472
Abstract	Metrology plays an important role in surface figuring with subnanometer accuracy. We have developed relative angle determinable stitching interferometry for the surface figuring of elliptical mirrors, in order to realize hard x-ray nanofocusing. In a stitching system, stitching angles are determined not by the general method using a common area between neighboring shots, but by the new method using the mirror's tilt angles measured at times when profile data are acquired. The high measurement accuracy of approximately 4 nm (peak-to-valley) was achieved in the measurement of a cylindrical surface having the same curvature as the elliptically designed shape to enable hard x-ray nanofocusing. © 2005 American Institute of Physics.
Publisher	American Institute of Physics
Source Title	Review of Scientific Instruments
Volume (Issue)	76(4)
Page	045102
Date of Issued	2005-03-16
Language	English
Handle URL	https://hdl.handle.net/11094/86967
PISSN	00346748
eISSN	10897623
NCID	AA00817730
NCID	AA12442307
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1063/1.1868472
Access Rights	open access
CopyRight	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 76(4), 045102 (2005) and may be found at https://doi.org/10.1063/1.1868472.
oaire:version	Version of Record
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Review of Scientific Instruments. 2005, 76(4), p. 045102
DC.title	Relative angle determinable stitching interferometry for hard x-ray reflective optics
DC.creator	Mimura, Hidekazu
	Yumoto, Hirokatsu
	Matsuyama, Satoshi
	Yamamura, Kazuya
	Sano, Yasuhisa
	Ueno, Kazumasa
	Endo, Katsuyoshi
	Mori, Yuzo
	Yabashi, Makina
	Tamasaku, Kenji
	Nishino, Yoshinori
	Ishikawa, Tetsuya
	Yamauchi, Kazuto
DC.publisher	American Institute of Physics
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2005-03-16
DC.identifier	https://doi.org/10.1063/1.1868472
DC.description	Hidekazu Mimura, Hirokatsu Yumoto, Satoshi Matsuyama, Kazuya Yamamura, Yasuhisa Sano, Kazumasa Ueno, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa and Kazuto Yamauchi, "Relative angle determinable stitching interferometry for hard x-ray reflective optics", Review of Scientific Instruments 76(4), 045102 (2005) https://doi.org/10.1063/1.1868472
DCTERMS.abstract	Metrology plays an important role in surface figuring with subnanometer accuracy. We have developed relative angle determinable stitching interferometry for the surface figuring of elliptical mirrors, in order to realize hard x-ray nanofocusing. In a stitching system, stitching angles are determined not by the general method using a common area between neighboring shots, but by the new method using the mirror's tilt angles measured at times when profile data are acquired. The high measurement accuracy of approximately 4 nm (peak-to-valley) was achieved in the measurement of a cylindrical surface having the same curvature as the elliptically designed shape to enable hard x-ray nanofocusing. © 2005 American Institute of Physics.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 76(4), 045102 (2005) and may be found at https://doi.org/10.1063/1.1868472.
DC.format	86967
citation_title	Relative angle determinable stitching interferometry for hard x-ray reflective optics
citation_author	Mimura, Hidekazu
	Yumoto, Hirokatsu
	Matsuyama, Satoshi
	Yamamura, Kazuya
	Sano, Yasuhisa
	Ueno, Kazumasa
	Endo, Katsuyoshi
	Mori, Yuzo
	Yabashi, Makina
	Tamasaku, Kenji
	Nishino, Yoshinori
	Ishikawa, Tetsuya
	Yamauchi, Kazuto
citation_publisher	American Institute of Physics
citation_language	English
citation_date	2005-03-16
citation_journal_title	Review of Scientific Instruments
citation_volume	76
citation_issue	4
citation_firstpage	045102
citation_doi	https://doi.org/10.1063/1.1868472
citation_public_url	https://hdl.handle.net/11094/86967

Relative angle determinable stitching interferometry for hard x-ray reflective optics

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