Development of scanning x-ray fluorescence microscope with spatial resolution of 30 nm using Kirkpatrick-Baez mirror optics

Matsuyama, S.; Mimura, H.; Yumoto, H.; Sano, Y.; Yamamura, K.; Yabashi, M.; Nishino, Y.; Tamasaku, K.; Ishikawa, T.; Yamauchi, K.

doi:https://doi.org/10.1063/1.2358699

Development of scanning x-ray fluorescence microscope with spatial resolution of 30 nm using Kirkpatrick-Baez mirror optics

Matsuyama, S.; Mimura, H.; Yumoto, H. et al.

Review of Scientific Instruments, 2006, 77(10), 103102

Number of Access:990（2025-08-14 15:06 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86971

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Title	Development of scanning x-ray fluorescence microscope with spatial resolution of 30 nm using Kirkpatrick-Baez mirror optics
Creator	NRID 1000010423196 1000010423196 CreatorName Matsuyama, S.
	NRID 1000030362651 1000030362651 CreatorName Mimura, H.
	NRID 1000020423197 1000020423197 CreatorName Yumoto, H.
	NRID 1000040252598 1000040252598 ORCID 0000-0002-1767-922X 0000-0002-1767-922X researchmap permalink read0042804 read0042804 Scopus Author ID 7402344818 7402344818 CreatorName Sano, Y.
	NRID 1000060240074 1000060240074 researchmap permalink read0014013 read0014013 Scopus Author ID 7201754767 7201754767 CreatorName Yamamura, K.
	NRID 1000000372144 1000000372144 CreatorName Yabashi, M.
	NRID 1000040392063 1000040392063 CreatorName Nishino, Y.
	NRID 1000030300883 1000030300883 CreatorName Tamasaku, K.
	NRID 1000080159699 1000080159699 CreatorName Ishikawa, T.
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, K.
Description	S. Matsuyama, H. Mimura, et al. "Development of scanning x-ray fluorescence microscope with spatial resolution of 30nm using Kirkpatrick-Baez mirror optics", Review of Scientific Instruments 77(10), 103102 (2006) https://doi.org/10.1063/1.2358699.
Abstract	We developed a high-spatial-resolution scanning x-ray fluorescence microscope (SXFM) using Kirkpatrick-Baez mirrors. As a result of two-dimensional focusing tests at BL29XUL of SPring-8, the full width at half maximum of the focused beam was achieved to be 50×30 nm2 (V×H) under the best focusing conditions. The measured beam profiles were in good agreement with simulated results. Moreover, beam size was controllable within the wide range of 30-1400 nm by changing the virtual source size, although photon flux and size were in a trade-off relationship. To demonstrate SXFM performance, a fine test chart fabricated using focused ion beam system was observed to determine the best spatial resolution. The element distribution inside a logo mark of SPring-8 in the test chart, which has a minimum linewidth of approximately 50-60 nm, was visualized with a spatial resolution better than 30 nm using the smallest focused x-ray beam. © 2006 American Institute of Physics.
Publisher	American Institute of Physics
Source Title	Review of Scientific Instruments
Volume (Issue)	77(10)
Page	103102
Date of Issued	2006-10-11
Language	English
Handle URL	https://hdl.handle.net/11094/86971
PISSN	00346748
eISSN	10897623
NCID	AA00817730
NCID	AA12442307
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1063/1.2358699
Access Rights	open access
CopyRight	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 77(10), 103102 (2006) and may be found at https://doi.org/10.1063/1.2358699.
oaire:version	Version of Record
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Review of Scientific Instruments. 2006, 77(10), p. 103102
DC.title	Development of scanning x-ray fluorescence microscope with spatial resolution of 30 nm using Kirkpatrick-Baez mirror optics
DC.creator	Matsuyama, S.
	Mimura, H.
	Yumoto, H.
	Sano, Y.
	Yamamura, K.
	Yabashi, M.
	Nishino, Y.
	Tamasaku, K.
	Ishikawa, T.
	Yamauchi, K.
DC.publisher	American Institute of Physics
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2006-10-11
DC.identifier	https://doi.org/10.1063/1.2358699
DC.description	S. Matsuyama, H. Mimura, et al. "Development of scanning x-ray fluorescence microscope with spatial resolution of 30nm using Kirkpatrick-Baez mirror optics", Review of Scientific Instruments 77(10), 103102 (2006) https://doi.org/10.1063/1.2358699.
DCTERMS.abstract	We developed a high-spatial-resolution scanning x-ray fluorescence microscope (SXFM) using Kirkpatrick-Baez mirrors. As a result of two-dimensional focusing tests at BL29XUL of SPring-8, the full width at half maximum of the focused beam was achieved to be 50×30 nm2 (V×H) under the best focusing conditions. The measured beam profiles were in good agreement with simulated results. Moreover, beam size was controllable within the wide range of 30-1400 nm by changing the virtual source size, although photon flux and size were in a trade-off relationship. To demonstrate SXFM performance, a fine test chart fabricated using focused ion beam system was observed to determine the best spatial resolution. The element distribution inside a logo mark of SPring-8 in the test chart, which has a minimum linewidth of approximately 50-60 nm, was visualized with a spatial resolution better than 30 nm using the smallest focused x-ray beam. © 2006 American Institute of Physics.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 77(10), 103102 (2006) and may be found at https://doi.org/10.1063/1.2358699.
DC.format	86971
citation_title	Development of scanning x-ray fluorescence microscope with spatial resolution of 30 nm using Kirkpatrick-Baez mirror optics
citation_author	Matsuyama, S.
	Mimura, H.
	Yumoto, H.
	Sano, Y.
	Yamamura, K.
	Yabashi, M.
	Nishino, Y.
	Tamasaku, K.
	Ishikawa, T.
	Yamauchi, K.
citation_publisher	American Institute of Physics
citation_language	English
citation_date	2006-10-11
citation_journal_title	Review of Scientific Instruments
citation_volume	77
citation_issue	10
citation_firstpage	103102
citation_doi	https://doi.org/10.1063/1.2358699
citation_public_url	https://hdl.handle.net/11094/86971

Development of scanning x-ray fluorescence microscope with spatial resolution of 30 nm using Kirkpatrick-Baez mirror optics

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