Experimental and simulation study of undesirable short-period deformation in piezoelectric deformable x-ray mirrors

Nakamori, Hiroki; Matsuyama, Satoshi; Imai, Shota; Kimura, Takashi; Sano, Yasuhisa; Kohmura, Yoshiki; Tamasaku, Kenji; Yabashi, Makina; Ishikawa, Tetsuya; Yamauchi, Kazuto

doi:https://doi.org/10.1063/1.4709499

Experimental and simulation study of undesirable short-period deformation in piezoelectric deformable x-ray mirrors

Nakamori, Hiroki; Matsuyama, Satoshi; Imai, Shota et al.

Review of Scientific Instruments, 2012, 83(5), 053701

Number of Access:1,020（2025-10-08 11:29 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86978

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Title	Experimental and simulation study of undesirable short-period deformation in piezoelectric deformable x-ray mirrors
Creator	CreatorName Nakamori, Hiroki
	NRID 1000010423196 1000010423196 CreatorName Matsuyama, Satoshi
	CreatorName Imai, Shota
	NRID 1000050531472 1000050531472 CreatorName Kimura, Takashi
	NRID 1000040252598 1000040252598 ORCID 0000-0002-1767-922X 0000-0002-1767-922X researchmap permalink read0042804 read0042804 Scopus Author ID 7402344818 7402344818 CreatorName Sano, Yasuhisa
	NRID 1000030270599 1000030270599 CreatorName Kohmura, Yoshiki
	NRID 1000030300883 1000030300883 CreatorName Tamasaku, Kenji
	NRID 1000000372144 1000000372144 CreatorName Yabashi, Makina
	NRID 1000080159699 1000080159699 CreatorName Ishikawa, Tetsuya
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, Kazuto
Description	Hiroki Nakamori, Satoshi Matsuyama, Shota Imai, Takashi Kimura, Yasuhisa Sano, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, and Kazuto Yamauchi, "Experimental and simulation study of undesirable short-period deformation in piezoelectric deformable x-ray mirrors", Review of Scientific Instruments 83(5), 053701 (2012) https://doi.org/10.1063/1.4709499.
Abstract	To construct adaptive x-ray focusing optics whose optical parameters can be varied while performing wavefront correction, ultraprecise piezoelectric deformable mirrors have been developed. We computationally and experimentally investigated undesirable short-period deformation caused by piezoelectric actuators adhered to the substrate during mirror deformation. Based on the results of finite element method analysis, shape measurements, and the observation of x-ray reflection images, a guideline is developed for designing deformable mirrors that do not have short-period deformation errors. © 2012 American Institute of Physics.
Publisher	American Institute of Physics
Source Title	Review of Scientific Instruments
Volume (Issue)	83(5)
Page	053701
Date of Issued	2012-05-03
Language	English
Handle URL	https://hdl.handle.net/11094/86978
PISSN	00346748
eISSN	10897623
NCID	AA00817730
NCID	AA12442307
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1063/1.4709499
Access Rights	open access
CopyRight	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 83(5), 053701 (2012) and may be found at https://doi.org/10.1063/1.4709499.
oaire:version	Version of Record
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Review of Scientific Instruments. 2012, 83(5), p. 053701
DC.title	Experimental and simulation study of undesirable short-period deformation in piezoelectric deformable x-ray mirrors
DC.creator	Nakamori, Hiroki
	Matsuyama, Satoshi
	Imai, Shota
	Kimura, Takashi
	Sano, Yasuhisa
	Kohmura, Yoshiki
	Tamasaku, Kenji
	Yabashi, Makina
	Ishikawa, Tetsuya
	Yamauchi, Kazuto
DC.publisher	American Institute of Physics
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2012-05-03
DC.identifier	https://doi.org/10.1063/1.4709499
DC.description	Hiroki Nakamori, Satoshi Matsuyama, Shota Imai, Takashi Kimura, Yasuhisa Sano, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, and Kazuto Yamauchi, "Experimental and simulation study of undesirable short-period deformation in piezoelectric deformable x-ray mirrors", Review of Scientific Instruments 83(5), 053701 (2012) https://doi.org/10.1063/1.4709499.
DCTERMS.abstract	To construct adaptive x-ray focusing optics whose optical parameters can be varied while performing wavefront correction, ultraprecise piezoelectric deformable mirrors have been developed. We computationally and experimentally investigated undesirable short-period deformation caused by piezoelectric actuators adhered to the substrate during mirror deformation. Based on the results of finite element method analysis, shape measurements, and the observation of x-ray reflection images, a guideline is developed for designing deformable mirrors that do not have short-period deformation errors. © 2012 American Institute of Physics.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 83(5), 053701 (2012) and may be found at https://doi.org/10.1063/1.4709499.
DC.format	86978
citation_title	Experimental and simulation study of undesirable short-period deformation in piezoelectric deformable x-ray mirrors
citation_author	Nakamori, Hiroki
	Matsuyama, Satoshi
	Imai, Shota
	Kimura, Takashi
	Sano, Yasuhisa
	Kohmura, Yoshiki
	Tamasaku, Kenji
	Yabashi, Makina
	Ishikawa, Tetsuya
	Yamauchi, Kazuto
citation_publisher	American Institute of Physics
citation_language	English
citation_date	2012-05-03
citation_journal_title	Review of Scientific Instruments
citation_volume	83
citation_issue	5
citation_firstpage	053701
citation_doi	https://doi.org/10.1063/1.4709499
citation_public_url	https://hdl.handle.net/11094/86978

Experimental and simulation study of undesirable short-period deformation in piezoelectric deformable x-ray mirrors

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