Deterministic retrieval of surface waviness by means of topography with coherent X-rays

Souvorov, A.; Yabashi, M.; Tamasaku, K.; Ishikawa, T.; Mori, Y.; Yamauchi, K.; Yamamura, K.; Saito, A.

doi:https://doi.org/10.1107/S0909049502008804

Deterministic retrieval of surface waviness by means of topography with coherent X-rays

Souvorov, A.; Yabashi, M.; Tamasaku, K. et al.

Journal of Synchrotron Radiation, 2002, 9(4), 223-228

Number of Access:1,091（2025-10-11 10:28 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86986

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Title	Deterministic retrieval of surface waviness by means of topography with coherent X-rays
Creator	CreatorName Souvorov, A.
	NRID 1000000372144 1000000372144 CreatorName Yabashi, M.
	NRID 1000030300883 1000030300883 CreatorName Tamasaku, K.
	NRID 1000080159699 1000080159699 CreatorName Ishikawa, T.
	NRID 1000000029125 1000000029125 CreatorName Mori, Y.
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, K.
	NRID 1000060240074 1000060240074 researchmap permalink read0014013 read0014013 Scopus Author ID 7201754767 7201754767 CreatorName Yamamura, K.
	CreatorName Saito, A.
Subject	Coherent X-rays
	Surface profiles
	Topography
Description	Souvorov, A., Yabashi, M., Tamasaku, K., Ishikawa, T., Mori, Y., Yamauchi, K., Yamamura, K. & Saito, A. (2002). J. Synchrotron Rad. 9, 223-228.
Abstract	A surface profile retrieval technique from multiple X-ray total reflection images taken at various distances with full coherent illumination is demonstrated. An experiment was performed using the 1 km-long BL29XU beamline at the SPring-8 facility, Japan. Obtained results are compared with results from the optical metrology technique (Fizeau's interferometer). Good agreement between X-ray and optical methods proves the validity of the current approach. Meanwhile, the sensitivity of the X-ray technique is several times higher than that of the standard one. This technique is well suited to the needs of characterizing grazing optics for new-generation X-ray sources.
Publisher	International Union of Crystallography
Source Title	Journal of Synchrotron Radiation
Volume (Issue)	9(4)
Page	223-228
Date of Issued	2002-07
Language	English
Handle URL	https://hdl.handle.net/11094/86986
PISSN	09090495
NCID	AA11022317
NCID	AA1210096X
Relation.isVersionOf	DOI (Publisher Version) https://doi.org/10.1107/S0909049502008804
Relation.isIdenticalTo	PMID 12091730
Access Rights	open access
CopyRight	Copyright International Union of Crystallography
oaire:version	Accepted Manuscript
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Journal of Synchrotron Radiation. 2002, 9(4), p. 223-228
DC.title	Deterministic retrieval of surface waviness by means of topography with coherent X-rays
DC.creator	Souvorov, A.
	Yabashi, M.
	Tamasaku, K.
	Ishikawa, T.
	Mori, Y.
	Yamauchi, K.
	Yamamura, K.
	Saito, A.
DC.publisher	International Union of Crystallography
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2002-07
DC.identifier	https://doi.org/10.1107/S0909049502008804
DC.subject	Coherent X-rays
	Surface profiles
	Topography
DC.description	Souvorov, A., Yabashi, M., Tamasaku, K., Ishikawa, T., Mori, Y., Yamauchi, K., Yamamura, K. & Saito, A. (2002). J. Synchrotron Rad. 9, 223-228.
DCTERMS.abstract	A surface profile retrieval technique from multiple X-ray total reflection images taken at various distances with full coherent illumination is demonstrated. An experiment was performed using the 1 km-long BL29XU beamline at the SPring-8 facility, Japan. Obtained results are compared with results from the optical metrology technique (Fizeau's interferometer). Good agreement between X-ray and optical methods proves the validity of the current approach. Meanwhile, the sensitivity of the X-ray technique is several times higher than that of the standard one. This technique is well suited to the needs of characterizing grazing optics for new-generation X-ray sources.
DC.rights	Copyright International Union of Crystallography
DC.format	86986
citation_title	Deterministic retrieval of surface waviness by means of topography with coherent X-rays
citation_author	Souvorov, A.
	Yabashi, M.
	Tamasaku, K.
	Ishikawa, T.
	Mori, Y.
	Yamauchi, K.
	Yamamura, K.
	Saito, A.
citation_publisher	International Union of Crystallography
citation_language	English
citation_date	2002-07
citation_journal_title	Journal of Synchrotron Radiation
citation_volume	9
citation_issue	4
citation_firstpage	223
citation_lastpage	228
citation_doi	https://doi.org/10.1107/S0909049502008804
citation_pmid	12091730
citation_public_url	https://hdl.handle.net/11094/86986

Deterministic retrieval of surface waviness by means of topography with coherent X-rays

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