Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics

Kanaoka, M.; Liu, C.; Nomura, K.; Ando, M.; Takino, H.; Fukuda, Y.; Mimura, H.; Yamauchi, K.; Mori, Y.

doi:https://doi.org/10.1116/1.2789440

Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics

Kanaoka, M.; Liu, C.; Nomura, K. et al.

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 2007, 25(6), 2110-2113

Number of Access:921（2025-08-15 10:58 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86987

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Title	Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics
Creator	CreatorName Kanaoka, M.
	CreatorName Liu, C.
	CreatorName Nomura, K.
	CreatorName Ando, M.
	CreatorName Takino, H.
	CreatorName Fukuda, Y.
	NRID 1000030362651 1000030362651 CreatorName Mimura, H.
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, K.
	NRID 1000000029125 1000000029125 CreatorName Mori, Y.
Description	M. Kanaoka et al. "Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics", Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 25, 2110-2113 (2007) https://doi.org/10.1116/1.2789440.
Abstract	The use of elastic emission machining (EEM) for fabricating optics from low-thermal-expansion glass for extreme ultraviolet (EUV) lithography is examined. EUV optics require figure accuracy and surface roughness of 0.1 nm root mean square (rms) or better. EEM using a rotating-sphere head is demonstrated to achieve this level of surface smoothness after a certain depth of removal dependent on the material being processed. In tests of continuous machining for 12 h, no increase in surface roughness is observed, demonstrating the high temporal stability of this noncontact processing method. EEM using a rotating-sphere head is thus confirmed to have sufficient figuring and smoothing capability for the fabrication of EUV optics. © 2007 American Vacuum Society.
Publisher	American Institute of Physics
Source Title	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume (Issue)	25(6)
Page	2110-2113
Date of Issued	2007-12-07
Language	English
Handle URL	https://hdl.handle.net/11094/86987
PISSN	10711023
NCID	AA10804928
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1116/1.2789440
Access Rights	open access
CopyRight	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 25, 2110-2113 (2007) and may be found at https://doi.org/10.1116/1.2789440.
oaire:version	Version of Record
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2007, 25(6), p. 2110-2113
DC.title	Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics
DC.creator	Kanaoka, M.
	Liu, C.
	Nomura, K.
	Ando, M.
	Takino, H.
	Fukuda, Y.
	Mimura, H.
	Yamauchi, K.
	Mori, Y.
DC.publisher	American Institute of Physics
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2007-12-07
DC.identifier	https://doi.org/10.1116/1.2789440
DC.description	M. Kanaoka et al. "Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics", Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 25, 2110-2113 (2007) https://doi.org/10.1116/1.2789440.
DCTERMS.abstract	The use of elastic emission machining (EEM) for fabricating optics from low-thermal-expansion glass for extreme ultraviolet (EUV) lithography is examined. EUV optics require figure accuracy and surface roughness of 0.1 nm root mean square (rms) or better. EEM using a rotating-sphere head is demonstrated to achieve this level of surface smoothness after a certain depth of removal dependent on the material being processed. In tests of continuous machining for 12 h, no increase in surface roughness is observed, demonstrating the high temporal stability of this noncontact processing method. EEM using a rotating-sphere head is thus confirmed to have sufficient figuring and smoothing capability for the fabrication of EUV optics. © 2007 American Vacuum Society.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 25, 2110-2113 (2007) and may be found at https://doi.org/10.1116/1.2789440.
DC.format	86987
citation_title	Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics
citation_author	Kanaoka, M.
	Liu, C.
	Nomura, K.
	Ando, M.
	Takino, H.
	Fukuda, Y.
	Mimura, H.
	Yamauchi, K.
	Mori, Y.
citation_publisher	American Institute of Physics
citation_language	English
citation_date	2007-12-07
citation_journal_title	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
citation_volume	25
citation_issue	6
citation_firstpage	2110
citation_lastpage	2113
citation_doi	https://doi.org/10.1116/1.2789440
citation_public_url	https://hdl.handle.net/11094/86987

Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics

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