Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement

Matsuyama, S.; Mimura, H.; Yamamura, K.; Yumoto, H.; Sano, Y.; Endo, K.; Mori, Y.; Yabashi, M.; Tamasaku, K.; Nishino, Y.; Ishikawa, T.; Yamauchi, K.

doi:https://doi.org/10.1117/12.567515

Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement

Matsuyama, S.; Mimura, H.; Yamamura, K. et al.

Proceedings of SPIE - The International Society for Optical Engineering, 2004, 5533, 181-191

Number of Access:1,305（2025-08-15 10:59 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86988

Link to primary information

File	Format	Terms of use	Size	Views	Date.Available	Description	information
ProcSPIEIntSocOptEng_5533_181	pdf	None	405 KB	113	2022.03.29

Item Information

Output File Export EndNote Basic Export Mendeley

Title	Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement
Creator	NRID 1000010423196 1000010423196 CreatorName Matsuyama, S.
	NRID 1000030362651 1000030362651 CreatorName Mimura, H.
	NRID 1000060240074 1000060240074 researchmap permalink read0014013 read0014013 Scopus Author ID 7201754767 7201754767 CreatorName Yamamura, K.
	NRID 1000020423197 1000020423197 CreatorName Yumoto, H.
	NRID 1000040252598 1000040252598 ORCID 0000-0002-1767-922X 0000-0002-1767-922X researchmap permalink read0042804 read0042804 Scopus Author ID 7402344818 7402344818 CreatorName Sano, Y.
	NRID 1000090152008 1000090152008 researchmap permalink endo5352 endo5352 Scopus Author ID 7402712908 7402712908 CreatorName Endo, K.
	NRID 1000000029125 1000000029125 CreatorName Mori, Y.
	NRID 1000000372144 1000000372144 CreatorName Yabashi, M.
	NRID 1000030300883 1000030300883 CreatorName Tamasaku, K.
	NRID 1000040392063 1000040392063 CreatorName Nishino, Y.
	NRID 1000080159699 1000080159699 CreatorName Ishikawa, T.
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, K.
Subject	Coherent X-rays
	EEM(elastic emission machining)
	Elliptical mirrors
	Hard X-ray focusing
	K-B mirror arrangement
	Plasma CVM(chemical vaporization machining)
	Ray trace
	Wave optics
	X-Ray microscopy
	X-Ray mirror
Description	Satoshi Matsuyama, Hidekazu Mimura, Kazuya Yamamura, Hirokatsu Yumoto, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, and Kazuto Yamauchi "Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement", Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, (18 October 2004); https://doi.org/10.1117/12.567515.
Description	Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States
Abstract	The spatial resolution of the scanning X-ray microscopy apparently depends on the beam size of the focused X-ray. Recently, highly accurate elliptical mirrors were reported to be fabricated, and nearly diffraction-limited line focusing was achieved. In this study, to realize diffraction-limited and 2-dimentional focusing with such highly accurate mirrors, accuracies to be realized in mirror alignings, for example, adjusting the glancing angle and the in-plane rotation, were estimated by employing two types of simulators. They are appropriately based on geometrical or wave-optical theories. They are alternatively employed according to the degree of accuracy required in the mirror alignment. A focusing unit with the adjusting mechanism fulfilling the required alignment accuracies was constructed, and the relationships between the alignment errors and focused beam profiles were quantitatively examined at the 1km-long beamline (BL29XUL) of SPring-8. Obtained results were in good agreement with the calculated results. Additionally, the alignment accuracy to be realized in the K-B unit equipping mirrors of larger NA (numerical aperture) was calculated to realize sufficient performances in focusing.
Publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
Source Title	Proceedings of SPIE - The International Society for Optical Engineering
Volume (Issue)	5533
Page	181-191
Date of Issued	2004-10-18
Language	English
Handle URL	https://hdl.handle.net/11094/86988
PISSN	0277786X
NCID	AA10619755
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1117/12.567515
Access Rights	open access
CopyRight	Copyright 2004 Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
oaire:version	Version of Record
Category	会議発表論文 Conference Paper

Resource Type	conference paper
Local Type	Conference Paper
DCMI Type	Text
DCTERMS.bibliographicCitation	Proceedings of SPIE - The International Society for Optical Engineering. 2004, 5533, p. 181-191
DC.title	Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement
DC.creator	Matsuyama, S.
	Mimura, H.
	Yamamura, K.
	Yumoto, H.
	Sano, Y.
	Endo, K.
	Mori, Y.
	Yabashi, M.
	Tamasaku, K.
	Nishino, Y.
	Ishikawa, T.
	Yamauchi, K.
DC.publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2004-10-18
DC.identifier	https://doi.org/10.1117/12.567515
DC.subject	Coherent X-rays
	EEM(elastic emission machining)
	Elliptical mirrors
	Hard X-ray focusing
	K-B mirror arrangement
	Plasma CVM(chemical vaporization machining)
	Ray trace
	Wave optics
	X-Ray microscopy
	X-Ray mirror
DC.description	Satoshi Matsuyama, Hidekazu Mimura, Kazuya Yamamura, Hirokatsu Yumoto, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, and Kazuto Yamauchi "Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement", Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, (18 October 2004); https://doi.org/10.1117/12.567515.
DC.description	Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States
DCTERMS.abstract	The spatial resolution of the scanning X-ray microscopy apparently depends on the beam size of the focused X-ray. Recently, highly accurate elliptical mirrors were reported to be fabricated, and nearly diffraction-limited line focusing was achieved. In this study, to realize diffraction-limited and 2-dimentional focusing with such highly accurate mirrors, accuracies to be realized in mirror alignings, for example, adjusting the glancing angle and the in-plane rotation, were estimated by employing two types of simulators. They are appropriately based on geometrical or wave-optical theories. They are alternatively employed according to the degree of accuracy required in the mirror alignment. A focusing unit with the adjusting mechanism fulfilling the required alignment accuracies was constructed, and the relationships between the alignment errors and focused beam profiles were quantitatively examined at the 1km-long beamline (BL29XUL) of SPring-8. Obtained results were in good agreement with the calculated results. Additionally, the alignment accuracy to be realized in the K-B unit equipping mirrors of larger NA (numerical aperture) was calculated to realize sufficient performances in focusing.
DC.rights	Copyright 2004 Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
DC.format	86988
citation_title	Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement
citation_author	Matsuyama, S.
	Mimura, H.
	Yamamura, K.
	Yumoto, H.
	Sano, Y.
	Endo, K.
	Mori, Y.
	Yabashi, M.
	Tamasaku, K.
	Nishino, Y.
	Ishikawa, T.
	Yamauchi, K.
citation_publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
citation_language	English
citation_date	2004-10-18
citation_journal_title	Proceedings of SPIE - The International Society for Optical Engineering
citation_volume	5533
citation_firstpage	181
citation_lastpage	191
citation_doi	https://doi.org/10.1117/12.567515
citation_public_url	https://hdl.handle.net/11094/86988

Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement

Link to primary information

Item Information

Show details