Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories

Assoufid, Lahsen; Rommeveaux, Amparo; Ohashi, Haruhiko; Yamauchi, Kazuto; Mimura, Hidekazu; Qian, Jun; Hignette, Olivier; Ishikawa, Tetsuya; Morawe, Christian; Macrander, Albert; Khounsary, Ali; Goto, Shunji

doi:https://doi.org/10.1117/12.623209

Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories

Assoufid, Lahsen; Rommeveaux, Amparo; Ohashi, Haruhiko et al.

Proceedings of SPIE - The International Society for Optical Engineering, 2005, 5921, 59210J

Number of Access:714（2025-08-15 10:59 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86989

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Title	Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories
Creator	CreatorName Assoufid, Lahsen
	CreatorName Rommeveaux, Amparo
	NRID 1000030443550 1000030443550 CreatorName Ohashi, Haruhiko
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, Kazuto
	NRID 1000030362651 1000030362651 CreatorName Mimura, Hidekazu
	CreatorName Qian, Jun
	CreatorName Hignette, Olivier
	NRID 1000080159699 1000080159699 CreatorName Ishikawa, Tetsuya
	CreatorName Morawe, Christian
	CreatorName Macrander, Albert
	CreatorName Khounsary, Ali
	CreatorName Goto, Shunji
Subject	Long trace profiler
	Round robin
	Surface metrology
	Synchrotron radiation
	X-ray mirrors
Description	Lahsen Assoufid, Amparo Rommeveaux, Haruhiko Ohashi, Kazuto Yamauchi, Hidekazu Mimura, Jun Qian, Olivier Hignette, Tetsuya Ishikawa, Christian Morawe, Albert Macrander, Ali Khounsary, and Shunji Goto "Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories", Proc. SPIE 5921, Advances in Metrology for X-Ray and EUV Optics, 59210J (16 September 2005); https://doi.org/10.1117/12.623209.
Description	Optics and Photonics 2005, 2005, San Diego, California, United States
Abstract	This paper presents the first series of round-robin metrology measurements of x-ray mirrors organized at the Advanced Photon Source (APS) in the USA, the European Synchrotron Radiation Facility in France, and the Super Photon Ring (SPring-8) (in a collaboration with Osaka University,) in Japan. This work is part of the three institutions' three-way agreement to promote a direct exchange of research information and experience amongst their specialists. The purpose of the metrology round robin is to compare the performance and limitations of the instrumentation used at the optical metrology laboratories of these facilities and to set the basis for establishing guidelines and procedures to accurately perform the measurements. The optics used in the measurements were selected to reflect typical, as well as state of the art, in mirror fabrication. The first series of the round robin measurements focuses on flat and cylindrical mirrors with varying sizes and quality. Three mirrors (two flats and one cylinder) were successively measured using long trace profilers. Although the three facilities' LTPs are of different design, the measurements were found to be in excellent agreement. The maximum discrepancy of the rms slope error values is 0.1 μrad, that of the rms shape error was 3 nm, and they all relate to the measurement of the cylindrical mirror. The next round-robin measurements will deal with elliptical and spherical optics.
Publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
Source Title	Proceedings of SPIE - The International Society for Optical Engineering
Volume (Issue)	5921
Page	59210J
Date of Issued	2005-09-16
Language	English
Handle URL	https://hdl.handle.net/11094/86989
PISSN	0277786X
NCID	AA10619755
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1117/12.623209
Access Rights	open access
CopyRight	Copyright 2005 Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
oaire:version	Version of Record
Category	会議発表論文 Conference Paper

Resource Type	conference paper
Local Type	Conference Paper
DCMI Type	Text
DCTERMS.bibliographicCitation	Proceedings of SPIE - The International Society for Optical Engineering. 2005, 5921, p. 59210J
DC.title	Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories
DC.creator	Assoufid, Lahsen
	Rommeveaux, Amparo
	Ohashi, Haruhiko
	Yamauchi, Kazuto
	Mimura, Hidekazu
	Qian, Jun
	Hignette, Olivier
	Ishikawa, Tetsuya
	Morawe, Christian
	Macrander, Albert
	Khounsary, Ali
	Goto, Shunji
DC.publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2005-09-16
DC.identifier	https://doi.org/10.1117/12.623209
DC.subject	Long trace profiler
	Round robin
	Surface metrology
	Synchrotron radiation
	X-ray mirrors
DC.description	Lahsen Assoufid, Amparo Rommeveaux, Haruhiko Ohashi, Kazuto Yamauchi, Hidekazu Mimura, Jun Qian, Olivier Hignette, Tetsuya Ishikawa, Christian Morawe, Albert Macrander, Ali Khounsary, and Shunji Goto "Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories", Proc. SPIE 5921, Advances in Metrology for X-Ray and EUV Optics, 59210J (16 September 2005); https://doi.org/10.1117/12.623209.
DC.description	Optics and Photonics 2005, 2005, San Diego, California, United States
DCTERMS.abstract	This paper presents the first series of round-robin metrology measurements of x-ray mirrors organized at the Advanced Photon Source (APS) in the USA, the European Synchrotron Radiation Facility in France, and the Super Photon Ring (SPring-8) (in a collaboration with Osaka University,) in Japan. This work is part of the three institutions' three-way agreement to promote a direct exchange of research information and experience amongst their specialists. The purpose of the metrology round robin is to compare the performance and limitations of the instrumentation used at the optical metrology laboratories of these facilities and to set the basis for establishing guidelines and procedures to accurately perform the measurements. The optics used in the measurements were selected to reflect typical, as well as state of the art, in mirror fabrication. The first series of the round robin measurements focuses on flat and cylindrical mirrors with varying sizes and quality. Three mirrors (two flats and one cylinder) were successively measured using long trace profilers. Although the three facilities' LTPs are of different design, the measurements were found to be in excellent agreement. The maximum discrepancy of the rms slope error values is 0.1 μrad, that of the rms shape error was 3 nm, and they all relate to the measurement of the cylindrical mirror. The next round-robin measurements will deal with elliptical and spherical optics.
DC.rights	Copyright 2005 Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
DC.format	86989
citation_title	Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories
citation_author	Assoufid, Lahsen
	Rommeveaux, Amparo
	Ohashi, Haruhiko
	Yamauchi, Kazuto
	Mimura, Hidekazu
	Qian, Jun
	Hignette, Olivier
	Ishikawa, Tetsuya
	Morawe, Christian
	Macrander, Albert
	Khounsary, Ali
	Goto, Shunji
citation_publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
citation_language	English
citation_date	2005-09-16
citation_journal_title	Proceedings of SPIE - The International Society for Optical Engineering
citation_volume	5921
citation_firstpage	59210J
citation_doi	https://doi.org/10.1117/12.623209
citation_public_url	https://hdl.handle.net/11094/86989

Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories

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