Development of a one-dimensional Wolter mirror for an advanced Kirkpatrick-Baez mirror

Matsuyama, S.; Wakioka, T.; Mimura, H. et al.

Proceedings of SPIE - The International Society for Optical Engineering, 2010, 7802, 780202

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Identifier to cite or link to this item: https://hdl.handle.net/11094/86990

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Title
Development of a one-dimensional Wolter mirror for an advanced Kirkpatrick-Baez mirror
Creator
NRID
1000010423196 1000010423196
CreatorName
Matsuyama, S.
CreatorName
Wakioka, T.
NRID
1000030362651 1000030362651
CreatorName
Mimura, H.
NRID
1000050531472 1000050531472
CreatorName
Kimura, T.
CreatorName
Kidani, N.
NRID
1000040252598 1000040252598
ORCID
0000-0002-1767-922X 0000-0002-1767-922X
researchmap permalink
read0042804 read0042804
Scopus Author ID
7402344818 7402344818
CreatorName
Sano, Y.
NRID
1000040392063 1000040392063
CreatorName
Nishino, Y.
NRID
1000030300883 1000030300883
CreatorName
Tamasaku, K.
NRID
1000000372144 1000000372144
CreatorName
Yabashi, M.
NRID
1000080159699 1000080159699
CreatorName
Ishikawa, T.
NRID
1000010174575 1000010174575
researchmap permalink
yamauchikazuto yamauchikazuto
Scopus Author ID
7801509680 7801509680
CreatorName
Yamauchi, K.
Subject
Advanced Kirkpatrick-Baez mirror
Full-field X-ray microscopy
Wolter mirror
X-ray mirror
Description
S. Matsuyama, T. Wakioka, H. Mimura, T. Kimura, N. Kidani, Y. Sano, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi "Development of a one-dimensional Wolter mirror for an advanced Kirkpatrick-Baez mirror", Proc. SPIE 7802, Advances in X-Ray/EUV Optics and Components V, 780202 (27 August 2010); https://doi.org/10.1117/12.860405.
SPIE Optical Engineering + Applications, 2010, San Diego, California, United States
Abstract
To realize achromatic full-field hard X-ray microscopy with a resolution better than 100 nm, we studied an imaging system consisting of an elliptical mirror and a hyperbolic mirror. The figure accuracies of the elliptical and hyperbolic mirrors required to obtain diffraction-limited resolution were investigated using a wave-optical simulator, and then elliptical and hyperbolic mirrors were precisely fabricated, following the criterion of the figure accuracies. Experiments to form a demagnified image of a one-dimensional slit installed 45 m upstream were conducted using the imaging system at an X-ray energy of 11.5 keV at BL29XUL of SPring-8. The system could form a demagnified image with the best resolution of 78 nm. In addition, the field of view to obtain a resolution better than 200 nm was 4.2 micron. © 2010 SPIE.
Publisher
Society of Photo-Optical Instrumentation Engineers (SPIE)
Source Title
Proceedings of SPIE - The International Society for Optical Engineering
Volume (Issue)
7802
Page
780202
Date of Issued
2010-08-27
Language
English
Handle URL
https://hdl.handle.net/11094/86990
PISSN
0277786X
NCID
AA10619755
Relation.isIdenticalTo
DOI (Publisher Version)
https://doi.org/10.1117/12.860405
Access Rights
open access
CopyRight
Copyright 2010 Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
oaire:version
Version of Record
Category
会議発表論文 Conference Paper