Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy

Matsuyama, S.; Kidani, N.; Mimura, H.; Kim, J.; Sano, Y.; Tamasaku, K.; Kohmura, Y.; Yabashi, M.; Ishikawa, T.; Yamauchi, K.

doi:https://doi.org/10.1117/12.892987

Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy

Matsuyama, S.; Kidani, N.; Mimura, H. et al.

Proceedings of SPIE - The International Society for Optical Engineering, 2011, 8139, 813905

Number of Access:1,042（2025-08-15 01:09 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86991

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Title	Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy
Creator	NRID 1000010423196 1000010423196 CreatorName Matsuyama, S.
	CreatorName Kidani, N.
	NRID 1000030362651 1000030362651 CreatorName Mimura, H.
	CreatorName Kim, J.
	NRID 1000040252598 1000040252598 ORCID 0000-0002-1767-922X 0000-0002-1767-922X researchmap permalink read0042804 read0042804 Scopus Author ID 7402344818 7402344818 CreatorName Sano, Y.
	NRID 1000030300883 1000030300883 CreatorName Tamasaku, K.
	NRID 1000030270599 1000030270599 CreatorName Kohmura, Y.
	NRID 1000000372144 1000000372144 CreatorName Yabashi, M.
	NRID 1000080159699 1000080159699 CreatorName Ishikawa, T.
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, K.
Subject	Advanced Kirkpatrick-Baez mirrors
	Full-field X-ray microscopy
	Wolter mirror
	X-ray mirror
Description	S. Matsuyama, N. Kidani, H. Mimura, J. Kim, Y. Sano, K. Tamasaku, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi "Development of a one-dimensional Wolter mirror for achromatic full-field x-ray microscopy", Proc. SPIE 8139, Advances in X-Ray/EUV Optics and Components VI, 813905 (28 September 2011); https://doi.org/10.1117/12.892987.
Description	SPIE Optical Engineering + Applications, 2011, San Diego, California, United States
Abstract	We investigated a one-dimensional Wolter mirror (which consists of an elliptical mirror and a hyperbolic mirror) with the aim of developing an achromatic full-field X-ray microscope with a resolution of better than 50 nm. X-ray mirrors were ultraprecisely fabricated by elastic emission machining to give a figure accuracy of 2 nm (peak-to-valley). A one-dimensional Wolter mirror that had been precisely constructed was evaluated in terms of the point-spread function at the center of the field of view (FOV) and the FOV at an X-ray energy of 11.5 keV at BL29XUL of SPring-8. It was found to have a minimum resolution of 43 nm and a FOV equivalent to 12.1 μm. These results are highly consistent with calculation results. © 2011 SPIE.
Publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
Source Title	Proceedings of SPIE - The International Society for Optical Engineering
Volume (Issue)	8139
Page	813905
Date of Issued	2011-09-28
Language	English
Handle URL	https://hdl.handle.net/11094/86991
PISSN	0277786X
NCID	AA10619755
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1117/12.892987
Access Rights	open access
CopyRight	Copyright 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
oaire:version	Version of Record
Category	会議発表論文 Conference Paper

Resource Type	conference paper
Local Type	Conference Paper
DCMI Type	Text
DCTERMS.bibliographicCitation	Proceedings of SPIE - The International Society for Optical Engineering. 2011, 8139, p. 813905
DC.title	Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy
DC.creator	Matsuyama, S.
	Kidani, N.
	Mimura, H.
	Kim, J.
	Sano, Y.
	Tamasaku, K.
	Kohmura, Y.
	Yabashi, M.
	Ishikawa, T.
	Yamauchi, K.
DC.publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2011-09-28
DC.identifier	https://doi.org/10.1117/12.892987
DC.subject	Advanced Kirkpatrick-Baez mirrors
	Full-field X-ray microscopy
	Wolter mirror
	X-ray mirror
DC.description	S. Matsuyama, N. Kidani, H. Mimura, J. Kim, Y. Sano, K. Tamasaku, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi "Development of a one-dimensional Wolter mirror for achromatic full-field x-ray microscopy", Proc. SPIE 8139, Advances in X-Ray/EUV Optics and Components VI, 813905 (28 September 2011); https://doi.org/10.1117/12.892987.
DC.description	SPIE Optical Engineering + Applications, 2011, San Diego, California, United States
DCTERMS.abstract	We investigated a one-dimensional Wolter mirror (which consists of an elliptical mirror and a hyperbolic mirror) with the aim of developing an achromatic full-field X-ray microscope with a resolution of better than 50 nm. X-ray mirrors were ultraprecisely fabricated by elastic emission machining to give a figure accuracy of 2 nm (peak-to-valley). A one-dimensional Wolter mirror that had been precisely constructed was evaluated in terms of the point-spread function at the center of the field of view (FOV) and the FOV at an X-ray energy of 11.5 keV at BL29XUL of SPring-8. It was found to have a minimum resolution of 43 nm and a FOV equivalent to 12.1 μm. These results are highly consistent with calculation results. © 2011 SPIE.
DC.rights	Copyright 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
DC.format	86991
citation_title	Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy
citation_author	Matsuyama, S.
	Kidani, N.
	Mimura, H.
	Kim, J.
	Sano, Y.
	Tamasaku, K.
	Kohmura, Y.
	Yabashi, M.
	Ishikawa, T.
	Yamauchi, K.
citation_publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
citation_language	English
citation_date	2011-09-28
citation_journal_title	Proceedings of SPIE - The International Society for Optical Engineering
citation_volume	8139
citation_firstpage	813905
citation_doi	https://doi.org/10.1117/12.892987
citation_public_url	https://hdl.handle.net/11094/86991

Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy

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