Transmission electron microscopy study on FeSi₂ nanoparticles synthesized by electron-beam evaporation

Won, Jong Han; Sato, Kazuhisa; Ishimaru, Manabu et al.

Journal of Applied Physics, 2006, 100(1), 014307

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Identifier to cite or link to this item: https://hdl.handle.net/11094/89397

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Title
Transmission electron microscopy study on FeSi₂ nanoparticles synthesized by electron-beam evaporation
Creator
CreatorName
Won, Jong Han
NRID
1000070314424 1000070314424
ORCID
0000-0001-9078-2541 0000-0001-9078-2541
researchmap permalink
read0158304 read0158304
Scopus Author ID
55552977400 55552977400
CreatorName
Sato, Kazuhisa
NRID
1000000264086 1000000264086
CreatorName
Ishimaru, Manabu
NRID
1000070016525 1000070016525
CreatorName
Hirotsu, Yoshihiko
Description
Jong Han Won, Kazuhisa Sato, Manabu Ishimaru, and Yoshihiko Hirotsu, "Transmission electron microscopy study on FeSi₂ nanoparticles synthesized by electron-beam evaporation", Journal of Applied Physics 100, 014307 (2006) https://doi.org/10.1063/1.2209751.
Abstract
We have synthesized epitaxially grown iron disilicide (FeSi₂) nanoparticles using an electron-beam evaporation technique and characterized them by transmission electron microscopy (TEM). An Fe film was deposited on a Si(100) substrate, followed by thermal annealing at 1073 K for 2 h. It was found that epitaxially grown nanoparticles with an average size of ∼ 10 nm were formed just beneath the Si surface, suggesting that the deposited Fe atoms diffuse into the substrate. Every single phase of nanoparticles was examined in detail by TEM observation, nanobeam electron diffraction, and energy-dispersive x-ray spectroscopy. Plan-view and cross-sectional TEM observations revealed that these nanoparticles consist of α-, α-, and γ-FeSi ₂. It was found that the morphology of nanoparticles is closely related to the phases. The α and β phases consist of angled hemisphere and asymmetric triangle-shaped nanoparticles, respectively, while the γ phase consists of hemispherical or columnar-shaped nanoparticles. These particle morphologies are discussed with respect to the lattice mismatches between the particles and the matrix. © 2006 American Institute of Physics.
Publisher
American Institute of Physics
Source Title
Journal of Applied Physics
Volume (Issue)
100(1)
Page
014307
Date of Issued
2006-07-01
Language
English
Handle URL
https://hdl.handle.net/11094/89397
PISSN
00218979
NCID
AA00693547
Relation.isIdenticalTo
DOI (Publisher Version)
https://doi.org/10.1063/1.2209751
Access Rights
open access
CopyRight
This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Jong Han Won, Kazuhisa Sato, Manabu Ishimaru, and Yoshihiko Hirotsu, "Transmission electron microscopy study on FeSi₂ nanoparticles synthesized by electron-beam evaporation", Journal of Applied Physics 100, 014307 (2006) and may be found at https://doi.org/10.1063/1.2209751.
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Version of Record
Category
学術雑誌論文 Journal Article