Formation and Structure of Crystalline Phase TiB₂ Films by Ion Beam Assisted Deposition(Physics, Process, Instrument & Measurements)

Wang, Yu; Setsuhara, Yuichi; Miyake, Shoji

Transactions of JWRI, 1994, 23(1), 7-11

Number of Access:5002025-10-05 11:31 Counts

Identifier to cite or link to this item: https://doi.org/10.18910/9096

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jwri23_01_007 pdf None 436 KB 90 2012.09.22  

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