Mass-Fabrication Scheme of Highly Sensitive Wireless Electrodeless MEMS QCM Biosensor with Antennas on Inner Walls of Microchannel

Zhou, Lianjie; Kato, Fumihito; Iijima, Masumi; Nonaka, Tomoyuki; Kuroda, Shun’ichi; Ogi, Hirotsugu

doi:https://doi.org/10.1021/acs.analchem.3c00139

Mass-Fabrication Scheme of Highly Sensitive Wireless Electrodeless MEMS QCM Biosensor with Antennas on Inner Walls of Microchannel

Zhou, Lianjie; Kato, Fumihito; Iijima, Masumi et al.

Analytical Chemistry, 2023, 95(13), 5507-5513

Number of Access:400（2025-07-18 09:56 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/93310

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Title	Mass-Fabrication Scheme of Highly Sensitive Wireless Electrodeless MEMS QCM Biosensor with Antennas on Inner Walls of Microchannel
Creator	CreatorName Zhou, Lianjie
	NRID 1000070780170 1000070780170 CreatorName Kato, Fumihito
	NRID 1000040390728 1000040390728 CreatorName Iijima, Masumi
	CreatorName Nonaka, Tomoyuki
	NRID 1000060263406 1000060263406 researchmap permalink read0186039 read0186039 CreatorName Kuroda, Shun’ichi
	NRID 1000090252626 1000090252626 researchmap permalink read0042771 read0042771 Scopus Author ID 35563683500 35563683500 CreatorName Ogi, Hirotsugu
Description	Zhou L., Kato F., Iijima M., et al. Mass-Fabrication Scheme of Highly Sensitive Wireless Electrodeless MEMS QCM Biosensor with Antennas on Inner Walls of Microchannel. Analytical Chemistry 95, 5507 (2023); https://doi.org/10.1021/acs.analchem.3c00139.
Abstract	Quartz-crystal-microbalance (QCM) biosensor is a typical label-free biosensor, and its sensitivity can be greatly improved by removing electrodes and wires that would be otherwise attached to the surfaces of the quartz resonator. The wireless-electrodeless QCM biosensor was then developed using a microelectro-mechanical systems (MEMS) process, although challenges remain in the sensitivity, the coupling efficiency, and the miniaturization (or mass production). In this study, we establish a MEMS process to obtain a large number of identical ultrasensitive and highly efficient sensor chips with dimensions of 6 mm square. The fundamental shear resonance frequency of the thinned AT-cut quartz resonator packaged in the microchannel exceeds 160 MHz, which is excited by antennas deposited on inner walls of the microchannel, significantly improving the electro-mechanical coupling efficiency in the wireless operation. The high sensitivity of the developed MEMS QCM biosensors is confirmed by the immunoglobulin G (IgG) detection using protein A and ZZ-tag displaying a bionanocapsule (ZZ-BNC), where we find that the ZZ-BNC can provide more effective binding sites and higher affinity to the target molecules, indicating a further enhancement in the sensitivity of the MEMS QCM biosensor. We then perform the label-free C-reactive protein (CRP) detection using the ZZ-BNC-functionalized MEMS QCM biosensor, which achieves a detection limit of 1 ng mL-1 or less even with direct detection.
Publisher	American Chemical Society
Source Title	Analytical Chemistry
Volume (Issue)	95(13)
Page	5507-5513
Date of Issued	2023-04-04
Language	English
Handle URL	https://hdl.handle.net/11094/93310
PISSN	00032700
eISSN	15206882
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1021/acs.analchem.3c00139
Access Rights	open access
CopyRight	This document is the Accepted Manuscript version of a Published Work that appeared in final form in Analytical Chemistry, © American Chemical Society after peer review and technical editing by the publisher. To access the final edited and published work see https://doi.org/10.1021/acs.analchem.3c00139.
oaire:version	Accepted Manuscript
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Analytical Chemistry. 2023, 95(13), p. 5507-5513
DC.title	Mass-Fabrication Scheme of Highly Sensitive Wireless Electrodeless MEMS QCM Biosensor with Antennas on Inner Walls of Microchannel
DC.creator	Zhou, Lianjie
	Kato, Fumihito
	Iijima, Masumi
	Nonaka, Tomoyuki
	Kuroda, Shun’ichi
	Ogi, Hirotsugu
DC.publisher	American Chemical Society
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2023-04-04
DC.identifier	https://doi.org/10.1021/acs.analchem.3c00139
DC.description	Zhou L., Kato F., Iijima M., et al. Mass-Fabrication Scheme of Highly Sensitive Wireless Electrodeless MEMS QCM Biosensor with Antennas on Inner Walls of Microchannel. Analytical Chemistry 95, 5507 (2023); https://doi.org/10.1021/acs.analchem.3c00139.
DCTERMS.abstract	Quartz-crystal-microbalance (QCM) biosensor is a typical label-free biosensor, and its sensitivity can be greatly improved by removing electrodes and wires that would be otherwise attached to the surfaces of the quartz resonator. The wireless-electrodeless QCM biosensor was then developed using a microelectro-mechanical systems (MEMS) process, although challenges remain in the sensitivity, the coupling efficiency, and the miniaturization (or mass production). In this study, we establish a MEMS process to obtain a large number of identical ultrasensitive and highly efficient sensor chips with dimensions of 6 mm square. The fundamental shear resonance frequency of the thinned AT-cut quartz resonator packaged in the microchannel exceeds 160 MHz, which is excited by antennas deposited on inner walls of the microchannel, significantly improving the electro-mechanical coupling efficiency in the wireless operation. The high sensitivity of the developed MEMS QCM biosensors is confirmed by the immunoglobulin G (IgG) detection using protein A and ZZ-tag displaying a bionanocapsule (ZZ-BNC), where we find that the ZZ-BNC can provide more effective binding sites and higher affinity to the target molecules, indicating a further enhancement in the sensitivity of the MEMS QCM biosensor. We then perform the label-free C-reactive protein (CRP) detection using the ZZ-BNC-functionalized MEMS QCM biosensor, which achieves a detection limit of 1 ng mL-1 or less even with direct detection.
DC.rights	This document is the Accepted Manuscript version of a Published Work that appeared in final form in Analytical Chemistry, © American Chemical Society after peer review and technical editing by the publisher. To access the final edited and published work see https://doi.org/10.1021/acs.analchem.3c00139.
DC.format	93310
citation_title	Mass-Fabrication Scheme of Highly Sensitive Wireless Electrodeless MEMS QCM Biosensor with Antennas on Inner Walls of Microchannel
citation_author	Zhou, Lianjie
	Kato, Fumihito
	Iijima, Masumi
	Nonaka, Tomoyuki
	Kuroda, Shun’ichi
	Ogi, Hirotsugu
citation_publisher	American Chemical Society
citation_language	English
citation_date	2023-04-04
citation_journal_title	Analytical Chemistry
citation_volume	95
citation_issue	13
citation_firstpage	5507
citation_lastpage	5513
citation_doi	https://doi.org/10.1021/acs.analchem.3c00139
citation_public_url	https://hdl.handle.net/11094/93310

Mass-Fabrication Scheme of Highly Sensitive Wireless Electrodeless MEMS QCM Biosensor with Antennas on Inner Walls of Microchannel

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