Athermal Crystal Defect Dynamics in Si Revealed by Cryo-High-Voltage Electron Microscopy

Sato, Kazuhisa; Yasuda, Hidehiro

ACS Omega, 2020, 5(3), 1457-1462

Number of Access:93（2025-06-07 13:24 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/97374

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Title
Athermal Crystal Defect Dynamics in Si Revealed by Cryo-High-Voltage Electron Microscopy
Creator
NRID
1000070314424 1000070314424
ORCID
0000-0001-9078-2541 0000-0001-9078-2541
researchmap permalink
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Scopus Author ID
55552977400 55552977400
CreatorName
Sato, Kazuhisa
NRID
1000060210259 1000060210259
CreatorName
Yasuda, Hidehiro
Description
Sato K., Yasuda H.. Athermal Crystal Defect Dynamics in Si Revealed by Cryo-High-Voltage Electron Microscopy. ACS Omega 5, 1457 (2020); https://doi.org/10.1021/acsomega.9b03028.
Abstract
Low-temperature crystal defect dynamics in Si has been studied by a newly developed cryo-high-voltage electron microscopy. The planar {113} defects of self-interstitial atoms were introduced at 94 K by 1 MeV electron irradiation with damage higher than 0.42 displacements per atom (dpa), unlike past findings. The defects once grew and then shrunk during the observation. We show that the nucleation and the dissociation dynamics of the {113} defects can be attributed to an athermal process, which is deduced from anomalously fast diffusion of self-interstitial atoms at a low temperature.
Publisher
American Chemical Societyservice
Source Title
ACS Omega
Volume (Issue)
5(3)
Page
1457-1462
Date of Issued
2020-01-08
Language
English
Handle URL
https://hdl.handle.net/11094/97374
eISSN
24701343
Relation.isVersionOf
DOI (Publisher Version)
https://doi.org/10.1021/acsomega.9b03028
Access Rights
open access
CopyRight
This document is the Accepted Manuscript version of a Published Work that appeared in final form in ACS Omega, © American Chemical Society after peer review and technical editing by the publisher. To access the final edited and published work see https://doi.org/10.1021/acsomega.9b03028.
oaire:version
Accepted Manuscript
Category
学術雑誌論文 Journal Article