Dynamics of ionized poly(4-hydroxystyrene)-type resist polymers with tert-butoxycarbonyl-protecting group

Okamoto, Kazumasa; Muroya, Yusa; Kozawa, Takahiro

Scientific Reports, 2024, 14, 16729

Number of Access:513（2025-08-14 15:06 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/98252

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Title
Dynamics of ionized poly(4-hydroxystyrene)-type resist polymers with tert-butoxycarbonyl-protecting group
Creator
NRID
1000010437353 1000010437353
ORCID
0000-0002-5207-5309 0000-0002-5207-5309
researchmap permalink
read0068599 read0068599
Scopus Author ID
57357264400 57357264400
CreatorName
Okamoto, Kazumasa
NRID
1000040334320 1000040334320
researchmap permalink
yusamuroya yusamuroya
Scopus Author ID
7006236139 7006236139
CreatorName
Muroya, Yusa
NRID
1000020251374 1000020251374
researchmap permalink
kozawa kozawa
Scopus Author ID
57361234400 57361234400
CreatorName
Kozawa, Takahiro
Subject
Chemically amplified resist
Density functional theory
Deprotonation
Pulse radiolysis
Radical cation
Description
Okamoto K., Muroya Y., Kozawa T.. Dynamics of ionized poly(4-hydroxystyrene)-type resist polymers with tert-butoxycarbonyl-protecting group. Scientific Reports 14, 16729 (2024); https://doi.org/10.1038/s41598-024-67794-0.
Abstract
The imaging reactions of resist materials used for nano-patterning have become radiation-chemical reactions, with the shortening of wavelengths of the exposure light sources in lithography systems. The most widely used patterning materials in industrial lithography are chemically amplified resists (CAR). Understanding the deprotonation mechanism of ionized polymers (radical cations) is important for acid generation in CARs. In this study, the dynamics of radical cations in poly(4-hydroxystyrene) (PHS)–type resist polymers, partially and totally protected by tert-butoxycarbonyl (t-BOC) groups, are investigated using a combination of electron pulse radiolysis experiments, acid yield measurements, and quantum chemical calculations. The t-BOC(oxy) group exhibits π-electron-donating behavior in the monomer cation but changes to electron-accepting behavior in the polymer cation, owing to the interaction between substituents. The destabilization of radical cations due to decreased intramolecular charge resonance may contribute to the high deprotonation efficiency of t-BOC-capped PHS polymers.
Publisher
Nature Research
Source Title
Scientific Reports
Volume (Issue)
14
Page
16729
Date of Issued
2024-07-20
Language
English
Handle URL
https://hdl.handle.net/11094/98252
eISSN
20452322
Relation.isIdenticalTo
DOI (Publisher Version)
https://doi.org/10.1038/s41598-024-67794-0
Access Rights
open access
CopyRight
This article is licensed under a Creative Commons Attribution 4.0 International License.
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Category
学術雑誌論文 Journal Article