Characterization of Ultrathin Conductive Films Using a Simplified Approach for Terahertz Time-Domain Spectroscopic Ellipsometry

Nagai, Masaya; Watanabe, Sou; Imamura, Ryosuke et al.

Journal of Infrared, Millimeter, and Terahertz Waves, 2024, 45(11-12), 949-966

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Identifier to cite or link to this item: https://hdl.handle.net/11094/98278

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Title
Characterization of Ultrathin Conductive Films Using a Simplified Approach for Terahertz Time-Domain Spectroscopic Ellipsometry
Creator
NRID
1000030343239 1000030343239
researchmap permalink
nagai_masaya nagai_masaya
Scopus Author ID
7402616480 7402616480
CreatorName
Nagai, Masaya
CreatorName
Watanabe, Sou
CreatorName
Imamura, Ryosuke
NRID
1000060240818 1000060240818
researchmap permalink
Masaaki_Ashida Masaaki_Ashida
Scopus Author ID
11043349200 11043349200
CreatorName
Ashida, Masaaki
CreatorName
Shimoyama, Kohei
NRID
1000020938188 1000020938188
ORCID
0000-0002-0277-0848 0000-0002-0277-0848
researchmap permalink
Hao-Bo_Li Hao-Bo_Li
Scopus Author ID
57226874126 57226874126
CreatorName
Li, Haobo
NRID
1000080464238 1000080464238
ORCID
0000-0002-5770-6026 0000-0002-5770-6026
researchmap permalink
hattori_n_azusa hattori_n_azusa
Scopus Author ID
7202095122 7202095122
CreatorName
Hattori, Azusa N.
NRID
1000080294130 1000080294130
researchmap permalink
read0051711 read0051711
Scopus Author ID
55628563936 55628563936
CreatorName
Tanaka, Hidekazu
Subject
Conductive sheets
Perovskite rare-earth nickelate
Spectroscopic ellipsometry
Terahertz
Ultrathin films
Description
The version of record of this article, first published in Journal of Infrared, Millimeter, and Terahertz Waves, is available online at Publisher’s website: https://doi.org/10.1007/s10762-024-01011-x.
Abstract
We present two ideas to simplify the measurement and analysis of terahertz time-domain spectroscopic ellipsometry data of ultrathin films. The measurement is simplified by using a specially designed sample holder with mirrors, which can be mounted on a cryostat. It allows us to perform spectroscopic ellipsometry by simply inserting the holder into a conventional terahertz spectroscopy system for measurements in transmission geometry. The analysis of the obtained data is simplified by considering a single interface with a certain sheet conductivity σs (since the film thickness is significantly smaller than the wavelength of the terahertz light). We demonstrate the application of these ideas by evaluating the sheet conductivities of two perovskite rare-earth nickelate thin films in the temperature range 78–478 K. The use of this particular analytical method and the sample holder design will help to establish terahertz time-domain spectroscopic ellipsometry as a characterization technique for ultrathin films.
Publisher
Springer
Source Title
Journal of Infrared, Millimeter, and Terahertz Waves
Volume (Issue)
45(11-12)
Page
949-966
Date of Issued
2024-09-12
Language
English
Handle URL
https://hdl.handle.net/11094/98278
PISSN
18666892
eISSN
18666906
Relation.isIdenticalTo
DOI (Publisher Version)
https://doi.org/10.1007/s10762-024-01011-x
Access Rights
open access
CopyRight
This article is licensed under a Creative Commons Attribution 4.0 International License.
oaire:version
Version of Record
Category
学術雑誌論文 Journal Article