大気圧プラズマCVD法による機能薄膜の超高速形成技術の開発

垣内, 弘章; 大参, 宏昌; 安武, 潔 他

大阪大学低温センターだより, 2004, 125, 16-22

Number of Access:1,1442025-08-13 23:27 Counts

Identifier to cite or link to this item: https://hdl.handle.net/11094/11726

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ltc125-16 pdf None 1.12 MB 2,565 2012.09.22  

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