A New Inductance Extraction Technique of On-wafer Spiral Inductor Based on Analytical Interconnect Formula

Shima, Hideki; Matsuoka, Toshimasa; Taniguchi, Kenji

IEICE Transactions on Electronics, 2005, E88-C(5), 824-828

Number of Access:387（2025-08-14 07:54 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/51713

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Title
A New Inductance Extraction Technique of On-wafer Spiral Inductor Based on Analytical Interconnect Formula
Creator
CreatorName
Shima, Hideki
NRID
1000080324820 1000080324820
ORCID
0000-0003-3876-2679 0000-0003-3876-2679
researchmap permalink
read0068628 read0068628
Scopus Author ID
7402741552 7402741552
CreatorName
Matsuoka, Toshimasa
NRID
1000020192180 1000020192180
CreatorName
Taniguchi, Kenji
Subject
spiral inductors
interconnect
closed-form expression
inductance extraction
analytical technique
Abstract
A new inductance extraction technique of spiral inductor from measurement fixture is presented. We propose a scalable expression of parasitic inductance for interconnects, and design consideration of test structure accommodating spiral inductor. The simple expression includes mutual inductance between the interconnects with high accuracy. The formula matches a commercial field solver inductance values within 1.4%. The layout of the test structure to reduce magnetic coupling between the spiral and the interconnects allows us to extract the intrinsic inductance of spiral more accurately. The proposed technique requires neither special fixture used for measurement-based method nor skilled worker for precise extraction with the analytical technique used.
Publisher
電子情報通信学会
The Institute of Electronics, Information and Communication Engineers
デンシ　ジョウホウ　ツウシン　ガッカイ
Source Title
IEICE Transactions on Electronics
Volume (Issue)
E88-C(5)
Page
824-828
Date of Issued
2005-05
Language
English
Handle URL
https://hdl.handle.net/11094/51713
PISSN
09168516
NCID
AA10826261
Relation.isIdenticalTo
DOI (Publisher Version)
https://doi.org/10.1093/ietele/e88-c.5.824
Access Rights
open access
CopyRight
copyright©2005 IEICE
oaire:version
Version of Record
Category
学術雑誌論文 Journal Article