journal article

Journal Article

Physics of Fluids B. 1992, 4(7), p. 2362-2367

Ion energetics in collisionless sheaths of rf process plasmas

American Institute of Physics Inc.

English

1992-07

https://doi.org/10.1063/1.860206

S. Hamaguchi, Physics of Fluids B: Plasma Physics 4, 2362 (1992) https://doi.org/10.1063/1.860206

Ion energy distribution functions in collisionless radio-frequency (rf) sheaths are discussed from the viewpoint of kinetic theory. Effects of rf fields on ion density and velocity profiles in plasma sheaths are also derived, based on ion fluid equations. It is shown that the ponderomotive force due to rf modulation of the magnitude of the sheath electric field exerts a retarding effect on the ion motion that counteracts the dc-bias field when the ratio of the ion transit frequency ωtr to rf modulation frequency ω is small but finite. Consequently, the time-averaged ion density is higher and the time-averaged ion fluid velocity is lower in rf sheaths by the order of (ωtr/ω)2 than those in corresponding dc sheaths. The influence of an oscillating plasma/sheath boundary on the ion energetics is also considered. Under suitable conditions, this induces rapid "quasiperiodic" variations in the ion energy distribution as the rf ω is increased. © 1992 American Institute of Physics.

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Physics of Fluids B: Plasma Physics 4, 2362 (1992) and may be found at https://doi.org/10.1063/1.860206.

78515

Ion energetics in collisionless sheaths of rf process plasmas

American Institute of Physics Inc.

English

1992-07

Physics of Fluids B

4

7

2362

2367

https://doi.org/10.1063/1.860206

https://hdl.handle.net/11094/78515