Resonance ultrasound spectroscopy for measuring elastic constants of thin films

Nakamura, Nobutomo; Ogi, Hirotsugu; Hirao, Masahiko

Japanese Journal of Applied Physics, 2004, 43, 3115-3118

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Identifier to cite or link to this item: https://hdl.handle.net/11094/84157

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Title
Resonance ultrasound spectroscopy for measuring elastic constants of thin films
Creator
NRID
1000050452404 1000050452404
researchmap permalink
nnakamura nnakamura
Scopus Author ID
7403356186 7403356186
ORCID
0000-0002-5338-842X 0000-0002-5338-842X
CreatorName
Nakamura, Nobutomo
NRID
1000090252626 1000090252626
researchmap permalink
read0042771 read0042771
Scopus Author ID
35563683500 35563683500
CreatorName
Ogi, Hirotsugu
NRID
1000080112027 1000080112027
CreatorName
Hirao, Masahiko
Subject
Elastic constants
Laser measurement
Micromechanics
Resonance ultrasound spectroscopy
Thin films
Description
Nobutomo Nakamura, Hirotsugu Ogi and Masahiko Hirao. Resonance ultrasound spectroscopy for measuring elastic constants of thin films. Japanese Journal of Applied Physics, 2004, 43(5S), 3115. https://doi.org/10.1143/JJAP.43.3115.
Abstract
We show an advanced technique for measuring elastic constants C ij of thin films deposited on substrates. Thin films often show anisotropy between the in-plane and out-of-plane directions because of their columnar structure, residual stress, texture, and incohesive bond. Then, thin films show macroscopically transverse isotropy and have five independent C ij. All the film Cij affect free-vibration resonance frequencies of the film/substrate layered specimen. Therefore, measuring the resonance frequencies permits us to determine the thin-film Cij with the other known parameters. In order to yield reliable Cij of thin films, we have to measure the resonance frequencies with sufficient accuracy and identify vibration modes of the measured resonance frequencies. We overcome these problems by developing a tripod and using a laser-Doppler interferometer, respectively. We applied the present technique to a copper thin film. Measured Cij are smaller than those of bulk and show elastic anisotropy. We attribute these features to the incohesive bond regions.
Publisher
The Japan Society of Applied Physics
Source Title
Japanese Journal of Applied Physics
Volume (Issue)
43
Page
3115-3118
Date of Issued
2004-05-28
Language
English
Handle URL
https://hdl.handle.net/11094/84157
PISSN
00214922
eISSN
13474065
NCID
AA10457675
Relation.isVersionOf
DOI (Publisher Version)
https://doi.org/10.1143/JJAP.43.3115
Access Rights
open access
oaire:version
Accepted Manuscript
Category
学術雑誌論文 Journal Article