An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy

Takahashi, Yukio; Kubo, Hideto; Nishino, Yoshinori; Furukawa, Hayato; Tsutsumi, Ryosuke; Yamauchi, Kazuto; Ishikawa, Tetsuya; Matsubara, Eiichiro

doi:https://doi.org/10.1063/1.3361265

An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy

Takahashi, Yukio; Kubo, Hideto; Nishino, Yoshinori et al.

Review of Scientific Instruments, 2010, 81(3), 033707

Number of Access:699（2025-08-15 10:58 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86976

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Title	An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy
Creator	NRID 1000000415217 1000000415217 CreatorName Takahashi, Yukio
	CreatorName Kubo, Hideto
	NRID 1000040392063 1000040392063 CreatorName Nishino, Yoshinori
	CreatorName Furukawa, Hayato
	CreatorName Tsutsumi, Ryosuke
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, Kazuto
	NRID 1000080159699 1000080159699 CreatorName Ishikawa, Tetsuya
	NRID 1000090173864 1000090173864 CreatorName Matsubara, Eiichiro
Description	Yukio Takahashi, Hideto Kubo, Yoshinori Nishino, Hayato Furukawa, Ryosuke Tsutsumi, Kazuto Yamauchi, Tetsuya Ishikawa, and Eiichiro Matsubara, "An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy", Review of Scientific Instruments 81(3), 033707 (2010) https://doi.org/10.1063/1.3361265.
Abstract	We developed a coherent x-ray diffraction microscopy (CXDM) system that enables us to precisely evaluate the electron density of an isolated sample. This system enables us to determine the dose per surface unit of x rays illuminated onto an isolated sample by combining incident x-ray intensity monitoring and the CXDM of a reference sample. By using this system, we determined the dose of x rays illuminated onto a nanostructured island fabricated by focused-ion-beam chemical vapor deposition and derived the electron density distribution of such a nanostructured island. A projection image of the nanostructured island with a spatial resolution of 24.1 nm and a contrast resolution higher than 2.3× 107 electrons/pixel was successfully reconstructed. © 2010 American Institute of Physics.
Publisher	American Institute of Physics
Source Title	Review of Scientific Instruments
Volume (Issue)	81(3)
Page	033707
Date of Issued	2010-03-30
Language	English
Handle URL	https://hdl.handle.net/11094/86976
PISSN	00346748
eISSN	10897623
NCID	AA00817730
NCID	AA12442307
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1063/1.3361265
Access Rights	open access
CopyRight	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 81(3), 033707 (2010) and may be found at https://doi.org/10.1063/1.3361265.
oaire:version	Version of Record
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Review of Scientific Instruments. 2010, 81(3), p. 033707
DC.title	An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy
DC.creator	Takahashi, Yukio
	Kubo, Hideto
	Nishino, Yoshinori
	Furukawa, Hayato
	Tsutsumi, Ryosuke
	Yamauchi, Kazuto
	Ishikawa, Tetsuya
	Matsubara, Eiichiro
DC.publisher	American Institute of Physics
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2010-03-30
DC.identifier	https://doi.org/10.1063/1.3361265
DC.description	Yukio Takahashi, Hideto Kubo, Yoshinori Nishino, Hayato Furukawa, Ryosuke Tsutsumi, Kazuto Yamauchi, Tetsuya Ishikawa, and Eiichiro Matsubara, "An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy", Review of Scientific Instruments 81(3), 033707 (2010) https://doi.org/10.1063/1.3361265.
DCTERMS.abstract	We developed a coherent x-ray diffraction microscopy (CXDM) system that enables us to precisely evaluate the electron density of an isolated sample. This system enables us to determine the dose per surface unit of x rays illuminated onto an isolated sample by combining incident x-ray intensity monitoring and the CXDM of a reference sample. By using this system, we determined the dose of x rays illuminated onto a nanostructured island fabricated by focused-ion-beam chemical vapor deposition and derived the electron density distribution of such a nanostructured island. A projection image of the nanostructured island with a spatial resolution of 24.1 nm and a contrast resolution higher than 2.3× 107 electrons/pixel was successfully reconstructed. © 2010 American Institute of Physics.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 81(3), 033707 (2010) and may be found at https://doi.org/10.1063/1.3361265.
DC.format	86976
citation_title	An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy
citation_author	Takahashi, Yukio
	Kubo, Hideto
	Nishino, Yoshinori
	Furukawa, Hayato
	Tsutsumi, Ryosuke
	Yamauchi, Kazuto
	Ishikawa, Tetsuya
	Matsubara, Eiichiro
citation_publisher	American Institute of Physics
citation_language	English
citation_date	2010-03-30
citation_journal_title	Review of Scientific Instruments
citation_volume	81
citation_issue	3
citation_firstpage	033707
citation_doi	https://doi.org/10.1063/1.3361265
citation_public_url	https://hdl.handle.net/11094/86976

An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy

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