Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm

Kimura, Takashi; Mimura, Hidekazu; Handa, Soichiro; Yumoto, Hirokatsu; Yokoyama, Hikaru; Imai, Shota; Matsuyama, Satoshi; Sano, Yasuhisa; Tamasaku, Kenji; Komura, Yoshiki; Nishino, Yoshinori; Yabashi, Makina; Ishikawa, Tetsuya; Yamauchi, Kazuto

doi:https://doi.org/10.1063/1.3509384

Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm

Kimura, Takashi; Mimura, Hidekazu; Handa, Soichiro et al.

Review of Scientific Instruments, 2010, 81(12), 123704

Number of Access:1,014（2025-08-15 11:00 Counts）

Identifier to cite or link to this item: https://hdl.handle.net/11094/86977

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Title	Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm
Creator	NRID 1000050531472 1000050531472 CreatorName Kimura, Takashi
	NRID 1000030362651 1000030362651 CreatorName Mimura, Hidekazu
	CreatorName Handa, Soichiro
	NRID 1000020423197 1000020423197 CreatorName Yumoto, Hirokatsu
	CreatorName Yokoyama, Hikaru
	CreatorName Imai, Shota
	NRID 1000010423196 1000010423196 CreatorName Matsuyama, Satoshi
	NRID 1000040252598 1000040252598 ORCID 0000-0002-1767-922X 0000-0002-1767-922X researchmap permalink read0042804 read0042804 Scopus Author ID 7402344818 7402344818 CreatorName Sano, Yasuhisa
	NRID 1000030300883 1000030300883 CreatorName Tamasaku, Kenji
	NRID 1000030270599 1000030270599 CreatorName Komura, Yoshiki
	NRID 1000040392063 1000040392063 CreatorName Nishino, Yoshinori
	NRID 1000000372144 1000000372144 CreatorName Yabashi, Makina
	NRID 1000080159699 1000080159699 CreatorName Ishikawa, Tetsuya
	NRID 1000010174575 1000010174575 researchmap permalink yamauchikazuto yamauchikazuto Scopus Author ID 7801509680 7801509680 CreatorName Yamauchi, Kazuto
Description	Takashi Kimura, Hidekazu Mimura, Soichiro Handa, Hirokatsu Yumoto, Hikaru Yokoyama, Shota Imai, Satoshi Matsuyama, Yasuhisa Sano, Kenji Tamasaku, Yoshiki Komura, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, and Kazuto Yamauchi , "Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm", Review of Scientific Instruments 81(12), 123704 (2010) https://doi.org/10.1063/1.3509384.
Abstract	In situ wavefront compensation is a promising method to realize a focus size of only a few nanometers for x-ray beams. However, precise compensation requires evaluation of the wavefront with an accuracy much shorter than the wavelength. Here, we characterized a one-dimensionally focused beam with a width of 7 nm at 20 keV using a multilayer mirror. We demonstrate that the wavefront can be determined precisely from multiple intensity profiles measured around the beamwaist. We compare the phase profiles recovered from intensity profiles measured under the same mirror condition but with three different aperture sizes and find that the accuracy of phase retrieval is as small as 12. © 2010 American Institute of Physics.
Publisher	American Institute of Physics
Source Title	Review of Scientific Instruments
Volume (Issue)	81(12)
Page	123704
Date of Issued	2010-12-29
Language	English
Handle URL	https://hdl.handle.net/11094/86977
PISSN	00346748
eISSN	10897623
NCID	AA00817730
NCID	AA12442307
Relation.isIdenticalTo	DOI (Publisher Version) https://doi.org/10.1063/1.3509384
Access Rights	open access
CopyRight	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 81(12), 123704 (2010) and may be found at https://doi.org/10.1063/1.3509384.
oaire:version	Version of Record
Category	学術雑誌論文 Journal Article

Resource Type	journal article
Local Type	Journal Article
DCMI Type	Text
DCTERMS.bibliographicCitation	Review of Scientific Instruments. 2010, 81(12), p. 123704
DC.title	Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm
DC.creator	Kimura, Takashi
	Mimura, Hidekazu
	Handa, Soichiro
	Yumoto, Hirokatsu
	Yokoyama, Hikaru
	Imai, Shota
	Matsuyama, Satoshi
	Sano, Yasuhisa
	Tamasaku, Kenji
	Komura, Yoshiki
	Nishino, Yoshinori
	Yabashi, Makina
	Ishikawa, Tetsuya
	Yamauchi, Kazuto
DC.publisher	American Institute of Physics
DC.language' scheme='DCTERMS.RFC1766	English
DC.type' scheme='DCTERMS.DCMIType	Text
DCTERMS.issued' scheme='DCTERMS.W3CDTF	2010-12-29
DC.identifier	https://doi.org/10.1063/1.3509384
DC.description	Takashi Kimura, Hidekazu Mimura, Soichiro Handa, Hirokatsu Yumoto, Hikaru Yokoyama, Shota Imai, Satoshi Matsuyama, Yasuhisa Sano, Kenji Tamasaku, Yoshiki Komura, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, and Kazuto Yamauchi , "Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm", Review of Scientific Instruments 81(12), 123704 (2010) https://doi.org/10.1063/1.3509384.
DCTERMS.abstract	In situ wavefront compensation is a promising method to realize a focus size of only a few nanometers for x-ray beams. However, precise compensation requires evaluation of the wavefront with an accuracy much shorter than the wavelength. Here, we characterized a one-dimensionally focused beam with a width of 7 nm at 20 keV using a multilayer mirror. We demonstrate that the wavefront can be determined precisely from multiple intensity profiles measured around the beamwaist. We compare the phase profiles recovered from intensity profiles measured under the same mirror condition but with three different aperture sizes and find that the accuracy of phase retrieval is as small as 12. © 2010 American Institute of Physics.
DC.rights	This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 81(12), 123704 (2010) and may be found at https://doi.org/10.1063/1.3509384.
DC.format	86977
citation_title	Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm
citation_author	Kimura, Takashi
	Mimura, Hidekazu
	Handa, Soichiro
	Yumoto, Hirokatsu
	Yokoyama, Hikaru
	Imai, Shota
	Matsuyama, Satoshi
	Sano, Yasuhisa
	Tamasaku, Kenji
	Komura, Yoshiki
	Nishino, Yoshinori
	Yabashi, Makina
	Ishikawa, Tetsuya
	Yamauchi, Kazuto
citation_publisher	American Institute of Physics
citation_language	English
citation_date	2010-12-29
citation_journal_title	Review of Scientific Instruments
citation_volume	81
citation_issue	12
citation_firstpage	123704
citation_doi	https://doi.org/10.1063/1.3509384
citation_public_url	https://hdl.handle.net/11094/86977

Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm

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